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A Flexible Pressure Sensor with Wide Detection Range Based on Capacitive‐Piezoresistive Dual Mode Conversion for Human‐Machine Interaction

Advanced Materials & Technologies
Flexible pressure sensor is widely used in fields such as healthcare, intelligent prosthetics, and patient rehabilitation. However, how to ensure high sensitivity of the sensor while having a wide detection range remains a challenge.
Liangsong Huang   +5 more
semanticscholar   +1 more source

Ultrahigh-Sensitivity Piezoresistive Pressure Sensors for Detection of Tiny Pressure

ACS Applied Materials & Interfaces, 2018
High-sensitivity pressure sensors are crucial for the ultrasensitive touch technology and E-skin, especially at the tiny-pressure range below 100 Pa. However, it is highly challenging to substantially promote sensitivity beyond the current level at several to 200 kPa-1 and to improve the detection limit lower than 0.1 Pa, which is significant for the ...
Hongwei Li   +5 more
openaire   +2 more sources

Label-Free Sugar Detection Using Phenylboronic Acid-Functionalized Piezoresistive Microcantilevers

Analytical Chemistry, 2008
By appropriate surface functionalization using a thiolated phenylboronic acid derivative, gold-coated piezoresistive microcantilevers responsive to analytes having vicinal cis-diols were fashioned. A reference, uncoated cantilever permitted reliable subtraction of background signal (i.e., differential measurement).
Gary A, Baker   +2 more
openaire   +2 more sources

2D Lump/Artery Detection by Using Piezoresistive Force Sensors

ASME 2010 5th Frontiers in Biomedical Devices Conference and Exhibition, 2010
Detection of harder tissues within softer tissues has great advantages in both surgical and clinical applications. In surgical applications, surgeons need to precisely identify the location of potential arteries within softer surrounding tissues to either avoid damage to them or fix them.
M. Kalantari   +4 more
openaire   +1 more source

Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

Microelectronic Engineering, 2008
In order to obtain a sensor with force resolution better than 100pN for biomolecular detection, U-shaped piezoresistive cantilevers made of crystalline silicon have been fabricated. The resistors have been defined by ionic implantation of As+, yielding a shallow and thin resistor and they have been patterned parallel to the (100) crystallographic ...
G. Villanueva   +4 more
openaire   +1 more source

Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection

Measurement Science and Technology, 2008
This paper presents the design, fabrication and characterization method of piezoresistive nanocantilevers for ultra-sensitive force detection application. A shallow boron-doped layer as thin as 40 nm is achieved using spin-on diffusion. The piezoresistive nanocantilevers are patterned by electron beam (EB) lithography and fast atom beam (FAB) etching ...
Y G Jiang, T Ono, M Esashi
openaire   +1 more source

Piezoresistive and piezoelectric MEMS strain sensors for vibration detection

SPIE Proceedings, 2007
Both piezoresistive and piezoelectric materials are commonly used to detect strain caused by structural vibrations in macro-scale structures. With the increasing complexity and miniaturization of modern mechanical systems such as hard disk drive suspensions, it is imperative to explore the performance of these strain sensors when their dimensions must ...
Stanley Kon   +2 more
openaire   +1 more source

Detection of formaldehyde vapor using mercaptophenol-coated piezoresistive cantilevers

Sensors and Actuators B: Chemical, 2007
Piezoresistive cantilevers coated with mercaptophenol self-assembled monolayers were used to detect formaldehyde vapor at room temperature. The three isomers of mercaptophenol, namely 2-, 3-, and 4-mercaptophenol, were tested as probe molecules.
Seo, H, Jung, S, Jeon, S
openaire   +2 more sources

Lightweight, flexible and highly sensitive segregated microcellular nanocomposite piezoresistive sensors for human motion detection

, 2020
Lightweight, flexible and highly sensitive piezoresistive sensors are promising for future generations of wearable electronics, artificial intelligence, human-computer interaction and soft robotics.
Zhonglei Ma   +11 more
semanticscholar   +1 more source

Piezoresistive cantilever platform for label-free detection of molecules

2014 IEEE 5th Latin American Symposium on Circuits and Systems, 2014
MEMS sensors can be used for label-free detection in many different biological studies. Usually in this procedure the presence of special substance in a sample can be monitored based on its interaction and binding with specific probe molecules which are immobilized on a sensor.
Bahareh Gholamzadeh   +3 more
openaire   +1 more source

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