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A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection
IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2019A novel structure of resonant pressure sensor with integrated comb is presented with the electrostatic drive and piezoresistive detection. This design realizes double symmetric ‘H’ beams assembled in one pressure diaphragm to realize symmetric-lateral ...
Xiangguang Han +5 more
semanticscholar +1 more source
Viral detection using an embedded piezoresistive microcantilever sensor
Sensors and Actuators A: Physical, 2003The detection of aerosol-based vaccinia virus and solution-based vaccinia virus has been studied using a new type of microsensor design. In the embedded piezoresistive microcantilever (EPM) sensor, a tiny piezoresistive microcantilever is embedded or partially embedded into an active sensing material whose volumetric response to the presence of an ...
R.L. Gunter +4 more
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ACS Applied Materials and Interfaces
Flexible pressure sensors are intensively demanded in various fields such as electronic skin, medical and health detection, wearable electronics, etc. MXene is considered an excellent sensing material due to its benign metal conductivity and adjustable ...
Changzhou Du +6 more
semanticscholar +1 more source
Flexible pressure sensors are intensively demanded in various fields such as electronic skin, medical and health detection, wearable electronics, etc. MXene is considered an excellent sensing material due to its benign metal conductivity and adjustable ...
Changzhou Du +6 more
semanticscholar +1 more source
A flexible tactile sensor based on piezoresistive thin film for 3D force detection.
Review of Scientific Instruments, 2022This paper presents a flexible tactile sensor with a compact structure based on a piezoresistive thin film and an elastomer for detecting three-dimensional (3D) force.
Yan Liu +5 more
semanticscholar +1 more source
Key Engineering Materials, 2015
This paper presents a novel and effective characterization method for giant piezoresistive properties of silicon nanowires by using the reference structures. This contrast detection approach investigates the influences of quantum size effect and surface defects effect on piezoresistive coefficients of silicon nanowires by direct comparison of the ...
Jia Hong Zhang +5 more
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This paper presents a novel and effective characterization method for giant piezoresistive properties of silicon nanowires by using the reference structures. This contrast detection approach investigates the influences of quantum size effect and surface defects effect on piezoresistive coefficients of silicon nanowires by direct comparison of the ...
Jia Hong Zhang +5 more
openaire +1 more source
Advanced Electronic Materials, 2021
Wearable intelligent sensor materials have broad application prospects for human health detection and robot kinematics. 3D structure sensors have the advantages of high sensitivity, a wide detection range, and high strength, as is widely reported in ...
Mengting Xu +8 more
semanticscholar +1 more source
Wearable intelligent sensor materials have broad application prospects for human health detection and robot kinematics. 3D structure sensors have the advantages of high sensitivity, a wide detection range, and high strength, as is widely reported in ...
Mengting Xu +8 more
semanticscholar +1 more source
Chemical Detection with MOF-Functionalized Piezoresistive Microcantilever Arrays
ECS Meeting Abstracts, 2007Abstract not Available.
Arnab Choudhury +9 more
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Sub-ppm detection of vapors using piezoresistive microcantilever array sensors
Nanotechnology, 2008The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual ...
Yoshikawa, Genki +8 more
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ACS Applied Materials and Interfaces, 2021
The tremendous progress of the wearable intelligent system has brought an urgent demand for flexible pressure sensors, especially for those possessing high sensing performances, simple manufacture technology, and efficient integration.
Weibing Zhong +7 more
semanticscholar +1 more source
The tremendous progress of the wearable intelligent system has brought an urgent demand for flexible pressure sensors, especially for those possessing high sensing performances, simple manufacture technology, and efficient integration.
Weibing Zhong +7 more
semanticscholar +1 more source
Low-Noise Chemical Detection with a Piezoresistive Microcantilever Array
ECS Transactions, 2006Piezoresistive microcantilever systems are well suited for chemical sensing with low detection limits. A major hurdle in the realization of such systems is measurement noise associated with DC piezoresistance measurements. A piezoresistive microcantilever array has been fabricated and phase sensitive detection methods are used for realization of ...
P. J. Hesketh +4 more
openaire +2 more sources