Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor [PDF]
Micromachines, 2022 Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-
Rui Gao +12 more
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A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors [PDF]
Micromachines, 2021 In this paper, a piezoresistive pressure sensor based on silicon on insulator (SOI) was presented, which was composed of an SOI layer with sensing elements and a glass cap for a hermetic package. Different from its conventional counterparts, the position
Qinggang Meng +4 more
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Flexible Piezoresistive Pressure Sensor Based on Electrospun Rough Polyurethane Nanofibers Film for Human Motion Monitoring [PDF]
Nanomaterials, 2022 Flexible piezoresistive pressure sensors have been attracted a lot of attention due to their simple mechanism, easy fabrication, and convenient signal acquisition and analysis.
Bin Xue +4 more
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A ceramic-based ITON piezoresistive pressure sensor with wide temperature range (RT-900 °C) and broad frequency response [PDF]
Microsystems & NanoengineeringPiezoresistive pressure sensors offer high accuracy, high sensitivity, and a compact form factor, making them widely adopted in aerospace applications.
Haigang Wang +12 more
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Nanocomposite-Based Microstructured Piezoresistive Pressure Sensors for Low-Pressure Measurement Range [PDF]
Micromachines, 2018 Piezoresistive pressure sensors capable of detecting ranges of low compressive stresses have been successfully fabricated and characterised. The 5.5 × 5 × 1.6 mm3 sensors consist of a planar aluminium top electrode and a microstructured bottom electrode ...
Vasileios Mitrakos +6 more
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A High-Temperature Piezoresistive Pressure Sensor with an Integrated Signal-Conditioning Circuit [PDF]
Sensors, 2016 This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure sensor with an integrated signal-conditioning circuit, which consists of an encapsulated pressure-sensitive chip, a temperature compensation circuit and a ...
Zong Yao +7 more
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Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity [PDF]
Sensors, 2018 This paper proposes a novel micro-electromechanical system (MEMS) piezoresistive pressure sensor with a four-petal membrane combined with narrow beams and a center boss (PMNBCB) for low-pressure measurements.
Anh Vang Tran +2 more
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Stretchable Piezoresistive Pressure Sensor Array with Sophisticated Sensitivity, Strain‐Insensitivity, and Reproducibility [PDF]
Advanced ScienceThis study delves into the development of a novel 10 by 10 sensor array featuring 100 pressure sensor pixels, achieving remarkable sensitivity up to 888.79 kPa−1, through the innovative design of sensor structure.
Su Bin Choi +3 more
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A Flexible Piezoresistive Sensor Based on ZnO/MWCNTs/PDMS Composite Foam with Overall Performance Trade-Offs [PDF]
SensorsThe flexible foam piezoresistive sensor demonstrates significant potential for wearable strain-sensing applications due to its substantial deformation capacity, excellent flexibility, and cost effectiveness.
Jun Zheng +9 more
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Design of piezoresistive pressure sensor for enhancing stress of MEMS cantilever
Measurement: Sensors, 2023 In the automotive, aerospace, biomedical, and home appliance industries, piezoresistive pressure sensors were among the earliest MEMS products created. Piezoresistive microcantilever sensor is one of the promising mechanical microsensors that have been ...
Vasagiri Suresh, Burra Rajesh Kumar
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