Results 211 to 220 of about 4,228 (259)
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Temperature compensation of piezoresistive pressure sensors

Sensors and Actuators A: Physical, 1992
Abstract A major problem associated with piezoresistive pressure sensors is their cross sensitivity to temperature. The influence of temperature is manifested as a change in the span and offset of the sensor output. Moreover, in batch fabrication, minor process variations change the temperature characteristics for individual units.
Muhammad Akbar, Michael A. Shanblatt
openaire   +1 more source

Flexible Broad-Range Graphene-based Piezoresistive Pressure Sensor

2023 IEEE Nanotechnology Materials and Devices Conference (NMDC), 2023
In recent years, there has been a considerable emphasis on the development of flexible wearable sensors as a means of enhancing quality of life through advanced technologies. One type of sensor that has garnered significant interest is the wearable flexible pressure sensor, which holds great potential for healthcare applications and monitoring human ...
Mansouri S. L.   +7 more
openaire   +2 more sources

Research of MEMS piezoresistive pressure sensor

2010 International Conference on Future Information Technology and Management Engineering, 2010
A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software ANSYS, static and dynamics analysis and computer ...
null Meng Yuan   +4 more
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Design of smart piezoresistive pressure sensor

5th Korea-Russia International Symposium on Science and Technology. Proceedings. KORUS 2001 (Cat. No.01EX478), 2002
A silicon piezo-resistive smart pressure sensor is designed for implementation with a 0.6 /spl mu/m double poly double metal CMOS process. This smart sensor is composed of a diaphragm with piezoresistive resistors, Wheatstone bridge and circuitry composed of op-amp, A/D converter and UART.
null Hu-Min Jung   +2 more
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High performance piezoresistive low pressure sensors

2016 IEEE SENSORS, 2016
High performance piezoresistive low pressure sensors have been developed. The MEMS die has high sensitivity, superior linearity, low temperature dependence of output signal and excellent environmental stability. Small die size allows for the world's smallest packaged low pressure sensor solution.
L. Li, N. Belov, M. Klitzke, J-S. Park
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Piezoresistive pressure sensors for harsh environments

Optics and Precision Engineering, 2012
To increase the stabilization and reliability of piezoresistive pressure sensors working in harsh environments with harsh acids,alkalis,corrosive salts,and other destructive substances such as electrostatic particles and damp,a novel piezoresistive pressure sensor was presented.The innovation of the sensor was that the sensing elements of the sensor ...
San, Hai-Sheng   +4 more
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Modeling of Micromachined Piezoresistive Pressure Sensors

IETE Journal of Research, 2006
This paper presents a model for piezoresistive pressure sensor. The model assumes a plane stress condition and it accounts for the finite stiffness of the step up support, which is represented by elastically restrained boundary condition. Variation of stress due to thermal mismatch between silicon and dielectrics and change in piezoresistance due to ...
Prem Sagar, S Kal
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A piezoresistive pressure sensor interfacing circuit

IMTC/99. Proceedings of the 16th IEEE Instrumentation and Measurement Technology Conference (Cat. No.99CH36309), 2003
A signal conditioning circuit with digital output for piezoresistive pressure sensors based on CMOS current mode building blocks is presented. The proposed circuit uses an instrumentation amplifier (IA) based on operational floating amplifiers (OFA), adapted for resistive sensors.
S. Vlassis, S. Siskos, T. Laopoulos
openaire   +1 more source

A miniature piezoresistive catheter pressure sensor

Sensors and Actuators A: Physical, 1993
Abstract This paper discusses some factors which affect the dimensional limits of miniature piezoresistive catheter pressure sensors, analyses the influence of silicon wafer thickness and piezoresistor area dimensions on the sensitivity of the sensor on the basis of the mechanism of anisotropic etching of (100) silicon and the stress-distribution ...
Wu Xian-ping   +3 more
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A High Sensitivity Piezoresistive Pressure Sensor

First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 2007
In the current investigation, the piezoresistive effect in a van der Pauw (VDP) stress sensor subjected to biaxial stress was considered. The VDP resistance equations were combined with the silicon piezoresistivity equations to yield relations for the change in resistance of a VDP sensor in terms of the applied state of stress.
Mian, Ahsan, Law, Jesse
openaire   +2 more sources

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