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Carbon based functional materials enable multifunctional flexible strain sensors for wearable and implantable applications. [PDF]

Discov Nano
Wang S, Li X, Xie E, Gao S.
europepmc   +1 more source

A Bioinspired Flexible Pressure Sensor with Rigid-Flexible Coupling Featuring Simple Fabrication, Wide Pressure Range, and High Sensitivity. [PDF]

Biomimetics (Basel)
Tang Z, Chen X, Wang X, Yang Y, Tang S, Liu L.   +5 more
europepmc   +1 more source

A Piezoresistive Sensor with High Sensitivity and Flexibility Based on Porous Sponge [PDF]

Nanomaterials, 2022
Zhihui Qian, Luquan Ren
exaly   +2 more sources

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A silicon piezoresistive pressure sensor

Proceedings First IEEE International Workshop on Electronic Design, Test and Applications '2002, 2003
The paper describes the design, simulation and fabrication of a silicon pressure sensor. The device makes use a of monocrystalline silicon square diaphragm supported by a thick silicon rim. The diaphragm is fabricated by etching away the bulk silicon on a defined region until the required thickness is achieved.
Ranjit Singh, Low Lee Ngo, Ho Soon Seng, Frederick Neo Chwee Mok   +3 more
openaire   +1 more source

Piezoresistive Tactile Sensor Discriminating Multidirectional Forces [PDF]

Sensors, 2015
Flexible tactile sensors capable of detecting the magnitude and direction of the applied force together are of great interest for application in human-interactive robots, prosthetics, and bionic arms/feet. Human skin contains excellent tactile sensing elements, mechanoreceptors, which detect their assigned tactile stimuli and transduce them into ...
Jonghwa Park, Hyunhyub Ko, Hyuneui Lim   +2 more
exaly   +7 more sources

A piezoresistive humidity sensor

Sensors and Actuators A: Physical, 1994
Abstract This paper deals with a new type of humidity sensor. Whereas conventional humidity sensors utilize the change of the specific resistivity or the dielectric properties here the humidity induced volume change of a polyimide layer leads to a deformation of a silicon membrane.
G. Gerlach, K. Sager
openaire   +1 more source