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Piezoresistive SXM sensors

Surface and Interface Analysis, 2002
Abstract The design, fabrication and evaluation of various microprobes for applications in scanning probe microscopy are presented. A piezoresistive cantilever with an integrated micro‐tip, as a basic structure, enables surface topography measurements with a resolution up to 0.1 nm.
I. W. Rangelow   +3 more
openaire   +1 more source

Piezoresistive Pressure Sensors

2020
Information about pressure and its measurement by means of pressure sensors is interesting in many different application areas. Contemporary applications, as for example the automotive industry, aerospace and medical technology, require ever smaller, adaptable and highly accurate pressure sensors.
Stephanus Büttgenbach   +3 more
openaire   +1 more source

An embedded polymer piezoresistive microcantilever sensor

Ultramicroscopy, 2003
We have developed a new type of chemical microsensor based on piezoresistive microcantilever technology. In this embedded polymer microsensor, a piezoresistive microcantilever is partially "embedded" into a polymeric material. Swelling of the polymer upon analyte exposure is measured as a simple resistance change in the embedded cantilever.
Timothy L, Porter   +4 more
openaire   +2 more sources

Harsh environment piezoresistive pressure sensors

2017 IEEE SENSORS, 2017
The capability to ensure reliability while operating in extreme environments is important for the most demanding automotive applications. Even though pressure sensors are a well-established area in the MEMS industry, improvements in sensor design are needed to deliver reliability and long operational life. This paper reports the design, fabrication and
Fernando Alfaro   +2 more
openaire   +1 more source

Textile Piezoresistive Sensors for Biomechanical Variables Monitoring

2006 International Conference of the IEEE Engineering in Medicine and Biology Society, 2006
In this paper is described the study leading to the implementation of two novel classes of textile piezoresistive sensors, for application in the field of post stroke rehabilitation and cardiovascular diseases monitoring. Two different approaches have been used, the first one leading to the realization of knitted transducer fabric to be integrated in ...
Maria Pacelli   +2 more
openaire   +2 more sources

Piezoresistive Strain Sensors

2009
In contrast to the fixed strain incorporated in logic devices for a fixed or constant improvement in device performance, piezoresistive strain sensors respond to variable strain through a modulation in the device resistance. The underlying physics of performance improvement in logic devices and strain transduction in piezoresistive strain sensors is ...
Yongke Sun   +2 more
openaire   +1 more source

Differential Piezoresistive Pressure Sensor

2007 International Semiconductor Conference, 2007
The pressure microsensor presented in this paper is based on a thin, elastic membrane, with boron implanted piezoresistive elements included, positioned in the maximum mechanical stress areas on the membrane. The pressure range for the developed sensors is in the 0divide400 mbar range, and this is the main novelty of this device.
B. Firtat   +4 more
openaire   +1 more source

A piezoresistive tactile sensor

IEEE Transactions on Instrumentation and Measurement, 1997
A piezoresistive strain-gauge sensor, mounted in an array configuration, for the measurement of distributed pressures during robotic grasp applications is investigated. The prototype presented consists of a 16-element test cell connected to an electronic acquisition unit that also provides temperature compensation.
openaire   +1 more source

Piezoresistive sensors for smart textiles

SPIE Proceedings, 2007
We have used inkjet printing to deposit silver conducting lines and small PEDOT (conducting polymer) sensors onto fabrics. The printed conductors penetrate into the fabric and can be shown to coat the individual fibers within the yarn, through the full thickness of the cloth.
Paul Calvert   +5 more
openaire   +1 more source

Noise in piezoresistive pressure sensors

2015 International Conference on Noise and Fluctuations (ICNF), 2015
In this paper we present the results of noise analysis in piezoresistive ceramic pressure sensors (CPSs) prepared by low temperature co-fired ceramics (LTCC) technology. For this study a piezoresistive CPSs in a full Wheatstone-bridge configuration were prepared. Low frequency noise measurements can be used for the quality evaluation of CPSs.
V. Sedlakova   +6 more
openaire   +1 more source

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