Results 251 to 260 of about 28,375 (268)
Some of the next articles are maybe not open access.

Electrostatically driven vacuum-encapsulated polysilicon resonators

Sensors and Actuators A: Physical, 1994
Harrie A C Tilmans
exaly  

An experimental study of ultrasonic vibration-assisted grinding of polysilicon using two-dimensional vertical workpiece vibration

, 2011
Yunfeng Peng   +6 more
semanticscholar   +1 more source

Polysilicon: a versatile material for microsystems

Sensors and Actuators A: Physical, 2002
exaly  

Effective impurity gettering by phosphorus- and boron-diffused polysilicon passivating contacts for silicon solar cells

Solar Energy Materials and Solar Cells, 2018
Anyao Liu, Di Yan, Sieu Pheng Phang
exaly  

Home - About - Disclaimer - Privacy