Results 231 to 240 of about 28,375 (268)
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Process optimization for polysilicon-thermal oxide-polysilicon capacitors
Microelectronics Reliability, 1996openaire +1 more source
Epitaxially-encapsulated polysilicon disk resonator gyroscope
IEEE/LEOS International Conference on Optical MEMS, 2013S. Nitzan +10 more
semanticscholar +1 more source
Laterally Actuated Platinum-Coated Polysilicon NEM Relays
Journal of microelectromechanical systems, 2013R. Parsa +7 more
semanticscholar +1 more source
Polysilicon integrated microsystems: technologies and applications
Sensors and Actuators A: Physical, 1996Roger T Howe +2 more
exaly
Gate-All-Around Junctionless Transistors With Heavily Doped Polysilicon Nanowire Channels
IEEE Electron Device Letters, 2011C. Su +5 more
semanticscholar +1 more source
Characterization and removal of polysilicon residue during wet etching
Microelectronic Engineering, 2016Hayoung Jeon +2 more
exaly

