Results 231 to 240 of about 28,375 (268)
Some of the next articles are maybe not open access.

Epitaxially-encapsulated polysilicon disk resonator gyroscope

IEEE/LEOS International Conference on Optical MEMS, 2013
S. Nitzan   +10 more
semanticscholar   +1 more source

Laterally Actuated Platinum-Coated Polysilicon NEM Relays

Journal of microelectromechanical systems, 2013
R. Parsa   +7 more
semanticscholar   +1 more source

Polysilicon Substrates

2001
M.Y. Ghannam, J.F. Nijs
openaire   +1 more source

Polysilicon integrated microsystems: technologies and applications

Sensors and Actuators A: Physical, 1996
Roger T Howe   +2 more
exaly  

Gate-All-Around Junctionless Transistors With Heavily Doped Polysilicon Nanowire Channels

IEEE Electron Device Letters, 2011
C. Su   +5 more
semanticscholar   +1 more source

Characterization and removal of polysilicon residue during wet etching

Microelectronic Engineering, 2016
Hayoung Jeon   +2 more
exaly  

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