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Thermal Compensated Pull-in Voltage MEMS Inclinometers

open access: yesProcedia Engineering, 2014
AbstractThe study of temperature effects on pull-in voltage-based inclinometers is reported here. A 75μ°-resolution MEMS inclinometer that uses pull-in voltages as the transduction mechanism is tested at different temperatures and inclinations. The microstructures used have differential actuation electrodes enabling the measurement of two pull-in ...
Filipe Serra Alves   +2 more
exaly   +3 more sources

Stability of a micromechanical pull-voltage reference

open access: yesIEEE Transactions on Instrumentation and Measurement, 2003
The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100-/spl mu/m length, 3-/spl mu/m width, and 11-/spl mu/m thickness are electrostatically ...
L A Rocha, E Cretu, R F Wolffenbuttel
exaly   +4 more sources

Digital Push–Pull Driver Power Supply Topology for Nondestructive Testing [PDF]

open access: yesSensors
Push–pull switch-mode power supplies are widely employed due to their high efficiency and power density. However, traditional designs typically depend on multiple auxiliary circuits to achieve functions such as power-up control, voltage regulation, and ...
Haohuai Xiong   +3 more
doaj   +2 more sources

An Experimental Study of the Pull-In Voltage in RF MEMS Switches Fabricated by Au Electroplating and Standard Wet Release: Considering the Bridge Geometry [PDF]

open access: yesSensors
Radio Frequency Micro Electro Mechanical Systems (RF MEMS) are devices showing exceptional potential to satisfy the demands of emerging RF electronic technologies, including those considered for high-power applications, such as for long distance ...
Loukas Michalas   +4 more
doaj   +2 more sources

Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams

open access: yesMicromachines, 2010
A gap with variable geometry is presented for both cantilever beam and fixed-fixed beam actuators as a method to reduce the pull-in voltage while maintaining a required displacement.
Darcy T. Haluzan   +3 more
doaj   +3 more sources

Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed

open access: yesApplied Sciences, 2023
For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage and actuation speed.
Xiaohui Yang   +6 more
doaj   +2 more sources

Push-pull voltage buffer with improved load capacity

open access: yesInformatyka, Automatyka, Pomiary w Gospodarce i Ochronie Środowiska
The article considers a method of increasing the load capacity of high-linear push-pull voltage buffer devices built on bipolar transistors. Buffer devices are designed to match the impedance of the signal generator to the impedance of the load and are ...
Oleksiy Azarov   +4 more
doaj   +2 more sources

Pull-in Phenomenon in the Electrostatically Micro-switch ‎Suspended between Two Conductive Plates using the Artificial ‎Neural Network [PDF]

open access: yesJournal of Applied and Computational Mechanics, 2022
Artificial Neural Networks (ANN) are designed to evaluate the pull-in voltage of MEMS switches. The mathematical model of a micro-switch subjected to electrostatic force is preliminarily illustrated to get the relevant equations providing static ...
Mortaza Aliasghary   +2 more
doaj   +1 more source

Increase of Three-Axis Accelerometer Sensitivity Using Capacitor in Spring [PDF]

open access: yesAUT Journal of Electrical Engineering, 2022
This study has introduced a three-axis capacitive accelerometer, in which the part of the capacitor that calculates acceleration is installed in the z direction in the spring to improve the sensitivity in the said direction.
kamran Delfan Hemmati   +1 more
doaj   +1 more source

Upper and lower bounds for the pull-in voltage and the pull-in distance for a generalized MEMS problem

open access: yesMathematical Biosciences and Engineering, 2022
<abstract><p>We study upper and lower bounds for the pull-in voltage and the pull-in distance for the one-dimensional prescribed mean curvature problem arising in MEMS</p> <p><disp-formula> <label/> <tex-math id="FE1"> \begin{document}$ \begin{equation*} \left \{\begin{array}{l} - \left( \frac{u^{ \prime } (x)
Yan-Hsiou Cheng   +3 more
openaire   +4 more sources

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