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Thermal Compensated Pull-in Voltage MEMS Inclinometers
AbstractThe study of temperature effects on pull-in voltage-based inclinometers is reported here. A 75μ°-resolution MEMS inclinometer that uses pull-in voltages as the transduction mechanism is tested at different temperatures and inclinations. The microstructures used have differential actuation electrodes enabling the measurement of two pull-in ...
Filipe Serra Alves +2 more
exaly +3 more sources
Stability of a micromechanical pull-voltage reference
The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100-/spl mu/m length, 3-/spl mu/m width, and 11-/spl mu/m thickness are electrostatically ...
L A Rocha, E Cretu, R F Wolffenbuttel
exaly +4 more sources
Digital Push–Pull Driver Power Supply Topology for Nondestructive Testing [PDF]
Push–pull switch-mode power supplies are widely employed due to their high efficiency and power density. However, traditional designs typically depend on multiple auxiliary circuits to achieve functions such as power-up control, voltage regulation, and ...
Haohuai Xiong +3 more
doaj +2 more sources
An Experimental Study of the Pull-In Voltage in RF MEMS Switches Fabricated by Au Electroplating and Standard Wet Release: Considering the Bridge Geometry [PDF]
Radio Frequency Micro Electro Mechanical Systems (RF MEMS) are devices showing exceptional potential to satisfy the demands of emerging RF electronic technologies, including those considered for high-power applications, such as for long distance ...
Loukas Michalas +4 more
doaj +2 more sources
A gap with variable geometry is presented for both cantilever beam and fixed-fixed beam actuators as a method to reduce the pull-in voltage while maintaining a required displacement.
Darcy T. Haluzan +3 more
doaj +3 more sources
Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed
For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage and actuation speed.
Xiaohui Yang +6 more
doaj +2 more sources
Push-pull voltage buffer with improved load capacity
The article considers a method of increasing the load capacity of high-linear push-pull voltage buffer devices built on bipolar transistors. Buffer devices are designed to match the impedance of the signal generator to the impedance of the load and are ...
Oleksiy Azarov +4 more
doaj +2 more sources
Pull-in Phenomenon in the Electrostatically Micro-switch Suspended between Two Conductive Plates using the Artificial Neural Network [PDF]
Artificial Neural Networks (ANN) are designed to evaluate the pull-in voltage of MEMS switches. The mathematical model of a micro-switch subjected to electrostatic force is preliminarily illustrated to get the relevant equations providing static ...
Mortaza Aliasghary +2 more
doaj +1 more source
Increase of Three-Axis Accelerometer Sensitivity Using Capacitor in Spring [PDF]
This study has introduced a three-axis capacitive accelerometer, in which the part of the capacitor that calculates acceleration is installed in the z direction in the spring to improve the sensitivity in the said direction.
kamran Delfan Hemmati +1 more
doaj +1 more source
<abstract><p>We study upper and lower bounds for the pull-in voltage and the pull-in distance for the one-dimensional prescribed mean curvature problem arising in MEMS</p> <p><disp-formula> <label/> <tex-math id="FE1"> \begin{document}$ \begin{equation*} \left \{\begin{array}{l} - \left( \frac{u^{ \prime } (x)
Yan-Hsiou Cheng +3 more
openaire +4 more sources

