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Silicon/quartz bonding and quartz deep RIE for the fabrication of quartz resonator structures

2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2008
In this paper, silicon/quartz bonding and quartz deep RIE (DRIE) processes have been developed to fabricate micromechanical quartz resonator structures. A low temperature (< 300degC), plasma-assisted silicon/quartz bonding condition that can provide the maximum bonding shear strength of 10 MPa has been experimentally constructed.
null Hyoung-Kyoon Jung   +4 more
openaire   +1 more source

QUARTZ AND PNEUMOCONIOSIS IN COALMINERS

The Lancet, 1981
In a routine survey of 623 miners in one colliery, 21 men, an unusually high number, showed radiological progression of simple pneumoconiosis in spite of generally low exposures to mixed coalmine dust. Comparison of the dust exposures of the 21 men with those of matched controls without pneumoconiosis showed highly significant differences in the ...
A, Seaton   +3 more
openaire   +2 more sources

Luminescence centers in quartz

Journal of Luminescence, 1984
The photoluminescence (PL), radioluminescence (RL) and thermoluminescence (TL), excited in natural Norwegian quartz crystals by monochromatic uv light, beta and X-rays, were studied. Excitation and emission spectra were measured and the dependence of the intensities and the spectral composition of the emission on irradiation temperature as well as on ...
openaire   +1 more source

Resource, characteristic, purification and application of quartz: a review

Minerals Engineering, 2022
Penghui Guo, Yongkui Li
exaly  

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