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Effective stiffness of qPlus sensor and quartz tuning fork

Ultramicroscopy, 2014
Quartz tuning forks (QTFs) have been extensively employed in scanning probe microscopy. For quantitative measurement of the interaction in nanoscale using QTF as a force sensor, we first measured the effective stiffness of qPlus sensors as well as QTFs and then compared the results with the cantilever beam theory that has been widely used to estimate ...
Jongwoo Kim   +4 more
openaire   +2 more sources

Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork

Japanese Journal of Applied Physics, 2006
We have developed a miniaturized angular rate sensor (5.0×3.2×1.3 mm3) with a laminated quartz tuning fork (3.7×0.97×0.24 mm3). An advanced reliable assembly process technology was applied to the packaging of LSI and the sensor element of the small thin sensor. Therefore, the sensor had high quality and superior mass productivity.
H. Uehara   +5 more
openaire   +1 more source

Novel designs for quartz tuning fork temperature sensor

Proceedings of 2011 6th International Forum on Strategic Technology, 2011
In this paper mainly describes a quartz tuning fork temperature sensor based on bending vibration. The main working components of quartz tuning fork temperature sensor are quartz tuning fork and driving circuit, according to the piezoelectric effect principle of quartz crystal, researching on correlative incentive mode, selecting cut type and setting ...
null Jing Ma, null Yanxia Yang
openaire   +1 more source

Quartz tuning fork based photoacoustic spectroscopy and sensing

The Journal of the Acoustical Society of America, 2023
Quartz crystal tuning forks (QTFs) resonators are key components for timing and frequency measurements, due to their high stability, high-quality factors and low power consumptions. Thanks to their piezoelectric properties, QTFs are employed as sensitive element in many fields and systems such as atomic force microscopy, near-field and microwave ...
Andrea Zifarelli   +7 more
openaire   +1 more source

Temperature sensor based on quartz tuning-fork resonator

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004., 2005
A miniature thermo-sensitive quartz tuning-fork resonator (TSQFR), working in the flexural vibration mode as a temperature sensor, has been expressed. This type of resonator, designed with a new doubly rotated ZYtw-cut, the rotation angle /spl Phi/ and /spl theta/ of which must be in the range 110/spl deg//spl plusmn/1/spl deg/ and 14/spl deg//spl ...
null Xu Jun   +3 more
openaire   +1 more source

A Novel Double-ended Tuning Fork Quartz Accelerometer

2011 Third International Conference on Measuring Technology and Mechatronics Automation, 2011
In order to design a quartz accelerometer with high-precision vibration characteristics and strong resistance to external shock, a novel double-ended tuning fork quartz accelerometer that combines the well-known principles of the tuning fork techniques is developed. The mechanical structure of the double-ended tuning fork quartz accelerometer comprises
Chihang Zhao   +4 more
openaire   +1 more source

A high sensitivity quartz tuning fork temperature sensor

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2009
In this paper, a highly sensitive temperature sensor based on quartz tuning fork resonators is reported. The temperature sensor is configured by ZY (110°/10°) Cut quartz crystal wafer based bulk acoustic wave (BAW) tuning fork resonators whose operating frequency is at 31 KHz.
null Jun Xu   +3 more
openaire   +1 more source

Smart temperature sensor with quartz tuning fork resonators

2008 9th International Conference on Solid-State and Integrated-Circuit Technology, 2008
This paper discusses a smart temperature sensor system that comprises of a high performance quartz tuning fork temperature sensor, interface with CMOS circuitry and control algorithm for reconfiguration. The ideal thermo-sensitive cut for quartz tuning fork resonators is analyzed with the theory. The specific cut quartz tuning fork was fabricated using
Jun Xu   +4 more
openaire   +1 more source

Automatic assembly of quartz tuning fork and microcantilever

2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2012
Conventional atomic force microscopes (AFMs) detect microcantilever deflection using an optical lever system. However, the complex mechanism of the optical lever system and the alignment of the laser spot on the microcantilever prevent such AFM systems from scanning large samples. AFM systems using a quartz tuning fork (QTF) as a force sensor have been
Chiao-Hua Cheng   +3 more
openaire   +1 more source

Electrostatic force microscopy using a quartz tuning fork

Applied Physics Letters, 2002
We demonstrate an electrostatic force microscopy based on a quartz tuning fork with 50 nm spatial resolution and 1 pN force sensitivity. We use a tuning fork with a spring constant of 1300 N/m and a Q factor of 3000. A sharpened nickel tip is attached to a prong of the tuning fork as well as electrically connected to the electrode of the prong.
Yongho Seo, Wonho Jhe, Cheol Seong Hwang
openaire   +1 more source

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