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Density Field for Rarefied Flow through an Orifice
The Physics of Fluids, 1961A theoretical investigation is made of the density field for rarefied flow through an orifice. Within the assumptions of Maxwellian velocity distribution of the gas and of diffuse reflection from the reservoir walls, exact expressions are found for the density at the center line of the effusing stream for a circular orifice and for all regions of the ...
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Simulations of rarefied gas flows
2013The new generation of Lithography equipment of ASML uses rarefied gas flows in order to keep the mirrors from blackening. These flows cannot be modeled by conventional computational fluid dynamics based on the Navier-Stokes, NS, equation, because the continuum approach is no longer valid.
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Rarefied gas flow through a long rectangular channel
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1999Felix Sharipov
exaly
Rarefied gas flow through a long tube at any pressure ratio
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1994Felix Sharipov
exaly
Rarefied gas flow through a slit. Influence of the boundary condition
Physics of Fluids, 1996Felix Sharipov
exaly