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Construction and testing of a rarefied gas flow facility

1967
A low-density gasdynamic facility, suitable for measurement of mass flow through small (approximately 1 mm diameter) nozzles, tubes, and orifices, was designed and constructed. The system is capable of producing and measuring mass flows at 100:1 upstream/downstream pressure ratios for the entire spectrum from continuum to free molecular flow.
openaire   +2 more sources

Simulations of rarefied gas flows

2013
The new generation of Lithography equipment of ASML uses rarefied gas flows in order to keep the mirrors from blackening. These flows cannot be modeled by conventional computational fluid dynamics based on the Navier-Stokes, NS, equation, because the continuum approach is no longer valid.
openaire   +1 more source

Rarefied Gas Flows

Weiqi Yang, Jing Men, Jie Li
openaire   +1 more source

Rarefied gas flow into vacuum through linearly diverging and converging channels

International Journal of Heat and Mass Transfer, 2023
Oleg Sazhin
exaly  

Rarefied gas flow through a long rectangular channel

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1999
Felix Sharipov, Sharipov Felix
exaly  

Hypersonic flows of rarefied gas

Journal of Applied Mathematics and Mechanics, 1962
openaire   +1 more source

Rarefied gas flow through a long tube at any pressure ratio

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1994
Felix Sharipov, Seleznev V D
exaly  

Rarefied gas flow through a long tube at any temperature ratio

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1996
Felix Sharipov, Sharipov Felix
exaly  

Rarefied gas flow through short tubes into vacuum

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2008
Felix Sharipov   +2 more
exaly  

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