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Construction and testing of a rarefied gas flow facility
1967A low-density gasdynamic facility, suitable for measurement of mass flow through small (approximately 1 mm diameter) nozzles, tubes, and orifices, was designed and constructed. The system is capable of producing and measuring mass flows at 100:1 upstream/downstream pressure ratios for the entire spectrum from continuum to free molecular flow.
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Simulations of rarefied gas flows
2013The new generation of Lithography equipment of ASML uses rarefied gas flows in order to keep the mirrors from blackening. These flows cannot be modeled by conventional computational fluid dynamics based on the Navier-Stokes, NS, equation, because the continuum approach is no longer valid.
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Rarefied gas flow into vacuum through linearly diverging and converging channels
International Journal of Heat and Mass Transfer, 2023Oleg Sazhin
exaly
Rarefied gas flow through a long rectangular channel
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1999Felix Sharipov, Sharipov Felix
exaly
Hypersonic flows of rarefied gas
Journal of Applied Mathematics and Mechanics, 1962openaire +1 more source
Rarefied gas flow through a long tube at any pressure ratio
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1994Felix Sharipov, Seleznev V D
exaly
Rarefied gas flow through a long tube at any temperature ratio
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1996Felix Sharipov, Sharipov Felix
exaly
Rarefied gas flow through short tubes into vacuum
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2008Felix Sharipov +2 more
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