Etching of Pyrex glass substrates by inductively coupled plasma reactive ion etching for micro/nanofluidic devices [PDF]
, 2006 Hyun Chul Jung +4 more
openalex +1 more source
Improving Adhesion of UHMWPE with Epoxy Matrix by Reactive Ion Etching of UHMWPE Using Ar-O<sub>2</sub> Plasma and the Effects of Plasma on Adhesion at the Micro- and Macroscale. [PDF]
ACS Appl Mater InterfacesSikander U +3 more
europepmc +1 more source
Effect of SF6flow rate on the etched surface profile and bottom grass formation in deep reactive ion etching process [PDF]
, 2006 Pradeep Dixit, Jianmin Miao
openalex +1 more source
Deep Reactive Ion Etching (DRIE) of High Aspect Ratio SiC Microstructures Using a Time-Multiplexed Etch-Passivate Process [PDF]
, 2006 Laura J. Evans, Glenn M. Beheim
openalex +1 more source
Dry Etching Characteristics of InGaZnO Thin Films Under Inductively Coupled Plasma-Reactive-Ion Etching with Hydrochloride and Argon Gas Mixture. [PDF]
Materials (Basel)Oh C +6 more
europepmc +1 more source
Reactive Ion Etching of NiFe Film with Organic Resist Mask and Metal Mask by Inductively Coupled Plasma [PDF]
, 2007 Tomomi Kanazawa +3 more
openalex +1 more source
On reactive Ion Etching of Parylene-C with Simple Photoresist Mask for Fabrication of High Porosity Membranes to Capture Circulating and Exfoliated Tumor Cells. [PDF]
Micromachines (Basel)Rabadi I +4 more
europepmc +1 more source
A study on polycrystalline 3C-SiC etching with magnetron applied reactive ion etching for M/NEMS applications [PDF]
, 2007 Gwiy-Sang Chung +2 more
openalex +1 more source
Optical Evaluation of ZnSe-based Quantum Structures Fabricated by CH4/H2 Reactive Ion Etching.
, 2001 Hitofumi FUKUSHI +2 more
openalex +2 more sources
Effect of reactive ion beam etching on the photoluminescence of CdTe epitaxial layers [PDF]
, 2008 Juan P. Martínez‐Pastor +4 more
openalex +1 more source