Results 111 to 120 of about 106,837 (225)

Enhancing Si₃N₄ Selectivity over SiO₂ in Low-RF Power NF₃-O₂ Reactive Ion Etching: The Effect of NO Surface Reaction. [PDF]

Sensors (Basel)
Tung NH, Lee H, Dinh DK, Kim DW, Lee JY, Eom GW, Kim HU, Kang WS.   +7 more
europepmc   +1 more source

Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y₂O₃-Y₄Al₂O₉ composite under CF₄/Ar/O₂ mixed gas conditions. [PDF]

Sci Rep
Ma HJ, Kim S, Kim HN, Kim MJ, Ko JW, Lee JW, Kim JH, Lee HC, Park YJ.   +8 more
europepmc   +1 more source

Fabrication of high quality factor photonic crystal microcavities in InAsP∕InP membranes combining reactive ion beam etching and reactive ion etching [PDF]

, 2009
Luis Javier Martínez, Iván Prieto, Benito Alén, P. A. Postigo   +3 more
openalex   +1 more source

Inductively Coupled Plasma Reactive Ion Etching of AlGaAsSb and InGaAsSb for Quaternary Antimonide MIM Thermophotovoltaics

, 2002
M. N. Palmisiano, Gregory M. Peake, R. J. Shul, Carol I. H. Ashby, Jeffrey G. Cederberg, M. J. Hafich, R. M. Biefeld   +6 more
openalex   +1 more source

Fabrication of Superhydrophobic Micro-Nano Hybrid Structures by Reactive Ion Etching with Au Nanoparticle Masks [PDF]

, 2010
C.Y. Lee, Sanghoon Yoon, G.E. Jang, Won Suk Yun   +3 more
openalex   +1 more source

Reactive Ion Beam Etching Effects on Maskless PZT Properties

, 2002
Caroline Soyer, Éric Cattan, Denis Rémiens   +2 more
openalex   +2 more sources

Removal of Photoresist Mask after the Cl₂/HBr/CF₄Reactive Ion Silicon Etching [PDF]

, 2010
Tae-Kyung Ha, Jong‐Chang Woo, Gwan-Ha Kim, Chang-Il Kim   +3 more
openalex   +1 more source

Development of a Deep Silicon Phase Fresnel Lens Using Gray-Scale Lithography and Deep Reactive Ion Etching

, 2004
Brian Morgan, Christopher M. Waits, John Krizmanic, Reza Ghodssi   +3 more
openalex   +2 more sources

Smoothing Single-Crystalline SiC Surface with Reactive Ion Etching Using Pure NF3 and NF3/Ar Mixture Gas Plasmas [PDF]

, 2010
Yuki Kotaka, Tomoki Nonoyama, Hirohisa Yamada, Takatsugu Kanatani, Testuro Tojo, Minoru Inaba, Akimasa Tasaka   +6 more
openalex   +1 more source

Incipient Fault Detection of Reactive Ion Etching Process

, 2005
Sang Jeen Hong, Jae Hyun Park, Seung-Soo Han   +2 more
openalex   +2 more sources