Results 121 to 130 of about 106,837 (225)

Nanometer-Scale Vertical-Sidewall Reactive Ion Etching of InGaAs for 3-D III-V MOSFETs

IEEE Electron Device Letters, 2014
Xin Zhao, J. D. del Alamo
semanticscholar   +1 more source

Electrical damage induced by reactive ion-beam etching of lead-zirconate-titanate thin films

, 2005
Caroline Soyer, Éric Cattan, Denis Rémiens   +2 more
openalex   +2 more sources

Wafer-Scale Hierarchical Nanopillar Arrays Based on Au Masks and Reactive Ion Etching for Effective 3D SERS Substrate. [PDF]

Materials (Basel), 2018
Men D, Wu Y, Wang C, Xiang J, Yang G, Wan C, Zhang H.   +6 more
europepmc   +1 more source

Directional emission of plastic luminescent films using photonic crystals fabricated by soft-X-ray interference lithography and reactive ion etching. [PDF]

Sci Rep, 2018
Wu Q, Liu B, Zhu Z, Gu M, Chen H, Xue C, Zhao J, Wu Y, Tai R, Ouyang X.   +9 more
europepmc   +1 more source

Accurate Reactive Ion Etching of Si, Ge and P Doped Ge in an SF6-O2 Radio-Frequency Plasma [PDF]

, 2012
Chalermwat Wongwanitwattana, Vishal Ajit Shah, M. Myronov, E. H. C. Parker, Terry Whall, D. R. Leadley   +5 more
openalex   +1 more source

Improving the pH sensitivity of ISFET arrays with reactive ion etching [PDF]

, 2017
Nicolas Moser, Christoforos Panteli, Dora Ma, C. Toumazou, Kristel Fobelets, Pantelis Georgiou   +5 more
openalex   +1 more source

On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching

, 2013
K. Nguyen, P. Basset, F. Marty, Y. Leprince‐Wang, T. Bourouina   +4 more
semanticscholar   +1 more source

Profile control of a borosilicate-glass groove formed by deep reactive ion etching

, 2008
T. Akashi, Yasuhiro Yoshimura
openalex   +2 more sources

Reactive ion etching of poly(vinylidene fluoride-trifluoroethylene) copolymer for flexible piezoelectric devices

, 2013
Yonggang Jiang, S. Shiono, Hiroyuki Hamada, T. Fujita, Deyuan Zhang, K. Maenaka   +5 more
semanticscholar   +1 more source

Fabrication of site-controlled InGaN quantum dots using reactive-ion etching

, 2012
L. Lee, P. Ku
semanticscholar   +1 more source