Results 181 to 190 of about 72,916 (314)

Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y₂O₃-Y₄Al₂O₉ composite under CF₄/Ar/O₂ mixed gas conditions. [PDF]

Sci Rep
Ma HJ, Kim S, Kim HN, Kim MJ, Ko JW, Lee JW, Kim JH, Lee HC, Park YJ.   +8 more
europepmc   +1 more source

Electron–Matter Interactions During Electron Beam Nanopatterning

Advanced Functional Materials, EarlyView.
This article reviews the electron–matter interactions important to nanopatterning with electron beam lithography (EBL). Electron–matter interactions, including secondary electron generation routes, polymer radiolysis, and electron beam induced charging, are discussed.
Camila Faccini de Lima, Prathiba Thamizhavel, Taylor J. Woehl   +2 more
wiley   +1 more source

Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics. [PDF]

Microsyst Nanoeng, 2019
Li Y, Zhang H, Yang R, Laffitte Y, Schmill U, Hu W, Kaddoura M, Blondeel EJM, Cui B.   +8 more
europepmc   +1 more source

A study on polycrystalline 3C-SiC etching with magnetron applied reactive ion etching for M/NEMS applications [PDF]

, 2007
Gwiy-Sang Chung, Chang-Min Ohn, Changwoo Nam   +2 more
openalex   +1 more source

Extensive Review of Materials for Next‐Generation Transparent Batteries and Their Design Strategies

Advanced Functional Materials, EarlyView.
Review explores emerging materials and design strategies for transparent batteries, examining electrodes, electrolytes, separators, and device architectures optimized for high electrochemical performance, mechanical flexibility, and optical transparency.
Atul Kumar Mishra, Shuvaraj Ghosh, Malkeshkumar Patel, Sourov Hossain, Ju‐Hyung Yun, Joondong Kim   +5 more
wiley   +1 more source

Perspectives of reactive ion etching of silicate glasses for optical microsystems

, 2021
C. Weigel, Ulrike Brokmann, M. Hofmann, Arne Behrens, Edda Rädlein, Martin Hoffmann, Steffen Strehle, Stefan Sinzinger   +7 more
openalex   +1 more source

From In‐Silico Optimized Microfabrication to Experimental Validation: Engineering a Tridimensional Epi‐Intraneural Interface

Advanced Functional Materials, EarlyView.
An epi‐intraneural interface is developed through in silico optimization and a novel tridimensional microfabrication pipeline. The device integrates penetrating and epineural contacts on a flexible substrate. Mechanical, electrochemical, and in vivo testing in rat and pig reveal robust implantation, low‐threshold activation, and site‐dependent ...
Federico Ciotti, Andrea Cimolato, Noemi Gozzi, Pietro Palopoli, Luca Brugnoli, Natalija Katic Secerovic, Rebecca Gallivan, Alexander Shokurov, Carlo Menon, Johannes Weichart, Ignacio Delgado‐Martinez, Weiguo Song, Stavros Zanos, Xavier Navarro, Stanisa Raspopovic   +14 more
wiley   +1 more source

Precision micro-mechanical components in single crystal diamond by deep reactive ion etching. [PDF]

Microsyst Nanoeng, 2018
Toros A, Kiss M, Graziosi T, Sattari H, Gallo P, Quack N.   +5 more
europepmc   +1 more source

Smoothing Single-Crystalline SiC Surface with Reactive Ion Etching Using Pure NF₃ and NF₃/Ar Mixture Gas Plasmas [PDF]

, 2010
Yuki Kotaka, Tomoki Nonoyama, Hirohisa Yamada, Takatsugu Kanatani, Testuro Tojo, Minoru Inaba, Akimasa Tasaka   +6 more
openalex   +1 more source

Does a Morphotropic Phase Boundary Exist in ZrxHf1‐xO2‐Based Thin Films?

Advanced Functional Materials, EarlyView.
This study investigates 6 nm zirconium‐rich hafnium‐zirconium oxide thin–film metal–insulator–metal capacitors using a combination of experimental methods and machine learning–based molecular dynamics simulations to provide insight into the physical mechanisms that enhance the dielectric constant near 0 V and attribute it to the field‐induced ...
Pramoda Vishnumurthy, Richard Ganser, Dong‐Gyu Kim, Intak Jeon, Chang Hwa Jung, Hanjin Lim, Thomas Mikolajick, Susan Trolier‐McKinstry, Alfred Kersch, Uwe Schroeder   +9 more
wiley   +1 more source