Results 71 to 80 of about 106,837 (225)

The investigation of mixed halogen freon/oxygen tungsten reactive ion etching chemistries with extension to silicon [PDF]

, 1989
T. Daubenspeck, E. J. White, Peter C. Sukanek   +2 more
openalex   +1 more source

Effect of Reactive Ion Etching on the Luminescence of GeV Color Centers in CVD Diamond Nanocrystals. [PDF]

Nanomaterials (Basel), 2021
Grudinkin SA, Feoktistov NA, Bogdanov KV, Baranov MA, Golubev VG, Baranov AV.   +5 more
europepmc   +1 more source

Reactive ion etching of SiGe alloys using HBr [PDF]

, 1991
Tim D. Bestwick, G. S. Oehrlein, Ying Zhang, G. M. W. Kroesen, E. de Frésart   +4 more
openalex   +1 more source

Improvement in current density of nano- and micro-structured Si solar cells by cost-effective elastomeric stamp process

AIP Advances, 2018
Effective incident light should be controlled for improving the current density of solar cells by employing nano- and micro-structures on silicon surface.
Kiseok Jeon, Hongsub Jee, Sangwoo Lim, Min Joon Park, Chaehwan Jeong   +4 more
doaj   +1 more source

Smooth Sidewalls on Crystalline Gold through Facet-Selective Anisotropic Reactive Ion Etching: Toward Low-Loss Plasmonic Devices. [PDF]

Nano Lett, 2022
Greenwood AB, Balram KC, Gersen H.
europepmc   +1 more source

Reactive ion etching-induced damage studies and application to self-aligned InP/InGaAs heterojunction bipolar transistor technology [PDF]

, 1993
Hin-Fai Chau, Dimitris Pavlidis, T. Brock   +2 more
openalex   +1 more source

High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures

Micro and Nano Engineering
This paper presents the fabrication of widely-spaced high aspect ratio ring-shape pillars (i.e. hollow pillars). Lateral etching of the pillars during deep reactive ion etching is challenging.
Wenhan Hu, Zihao Wang, Aixi Pan, Bo Cui
doaj   +1 more source

Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating. [PDF]

Appl Opt, 2022
Shi Z, Josell D, Jefimovs K, Romano L, Moffat TP, Stampanoni M, Schlepütz CM.   +6 more
europepmc   +1 more source

New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching

Nanoscale Research Letters, 2009
We report a low-cost and simple method for fabrication of nonspherical colloidal lithographic nanopatterns with a long-range order by preheating and oxygen reactive ion etching of monolayer and double-layer polystyrene spheres.
Cong Chunxiao, Junus WilliamChandra, Shen Zexiang, Yu Ting   +3 more
doaj   +1 more source

High resolution reactive ion etching of GaN and etch-induced effects [PDF]

, 1999
Rebecca Cheung, Roger J. Reeves, B. Rong, S. A. Brown, E. J. M. Fakkeldij, E. van der Drift, M. Kamp   +6 more
openalex   +1 more source