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Sputtering of Metal Oxides with an rf-Ion Source
Optical Interference Coatings, 1988Ion beam of relatively low energy and large area have become a valueable tool in thin film production. The energies for the most important processes are several ten to several hundered eV for etching and ion assisted evaporation and several thousand eV for sputtering.
Ingo Kessler +2 more
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RF absorption and ion heating in helicon sources
IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340), 2003Summary form only given, as follows. Initial ion temperature measurements in The Hot hELIcon eXperiment (HELIX) helicon source showed that the ion temperature is non-negligible and can be as high as 1 eV. The measurements also showed that the ion temperature scales with magnetic field strength and that the ion temperature is anisotropic with respect to
J.L. Kline +4 more
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RF H⁻ Ion Source with Saddle Antenna
2010In this project we are developing an RF H⁻ surface plasma source which will synthesize the most important developments in the field of negative ion sources to provide high pulsed and average current, high brightness, good lifetime, high reliability, and higher power efficiency.
Dudnikov, Vadim +4 more
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CHARACTERISTICS OF LOW POWER RF ION SOURCE
Problems of Atomic Science and TechnologyThe main characteristics of a low-power inductive RF ion source designed for use in a compact nuclear microprobe at the IAP NASU are presented. The source operates at a frequency of 45 MHz with RF power below 10 W. The extracted beam current reaches up to 3.5 µA through a 0.6 mm diameter aperture. The beam is composed of 1H+, 2H+, and 3H+ ions, and the
V.I. Voznyi +4 more
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Development and applications of the RF-driven ion source
The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts., 2003Summary form only given, as follows. RF driven ion sources have been developed at the Lawrence Berkeley National Laboratory for more than a decade. This type of ion source can be operated with 2 or 13.5 MHz in either cw or pulsed mode for positive or negative ion beam production.
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The plasma impedance of RF-ion sources
13th International Electric Propulsion Conference, 1978B. LENZ, R. WALTHER, H. LOEB
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Production of Metallic and Other Ions in rf Ion Source
Review of Scientific Instruments, 1966R. S. Hall, D. H. Poole, M. S. Stagg
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Effects of ion extraction on discharges in gridded ion source
AIP Advances, 2022Y R Yang, S H Fu, Z F Ding
exaly
A new off-line ion source facility at IGISOL
Nuclear Instruments & Methods in Physics Research B, 2020M Vilen, L Canete, B Cheal
exaly

