Results 41 to 50 of about 61,657 (284)

Buckling of polysilicon microbeams during sacrificial layer removal [PDF]

Journal of Micromechanics and Microengineering, 1998
In situ observations of buckling evolution of polysilicon microbeams during etch of the underneath sacrificial layer were carried out under an optical microscope. The surface geometry was obtained by AFM measurements. As the etching progressed, three buckling patterns were identified. Closed formulas were derived from theoretical analysis based on both
Zhang, Tongyi, Zhang, Xin, Zohar, Yitshak   +2 more
openaire   +2 more sources

Water-Soluble Sacrificial Layer of Sr₃Al₂O₆ for the Synthesis of Free-Standing Doped Ceria and Strontium Titanate

Applied Sciences
Epitaxial layers of water-soluble Sr3Al2O6 were fabricated as sacrificial layers on SrTiO3 (100) single-crystal substrates using the Pulsed Laser Deposition technique.
Simone Sanna, Olga Krymskaya, Antonello Tebano   +2 more
doaj   +1 more source

Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems

Sensors, 2020
In this work, SiNx/a-Si/SiNx caps on conductive coplanar waveguides (CPWs) are proposed for thin film encapsulation of radio-frequency microelectromechanical systems (RF MEMS), in view of the application of these devices in fifth generation (5G) and ...
Anna Persano, Fabio Quaranta, Antonietta Taurino, Pietro Aleardo Siciliano, Jacopo Iannacci   +4 more
doaj   +1 more source

High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter [PDF]

, 1998
The development of a capacitive microphone with an integrated detection circuit is described. The condenser microphone is made by micromachining of polyimide on silicon.
Bergveld, Piet, Olthuis, Wouter, Pedersen, Michael   +2 more
core   +2 more sources

Free-Standing GaMnAs Nanomachined Sheets for van der Pauw Magnetotransport Measurements

Micromachines, 2016
We report on the realization of free-standing GaMnAs epilayer sheets using nanomachining techniques. By optimizing the growth conditions of the sacrificial Al0.75Ga0.25As layer, free-standing metallic GaMnAs (with ~6% Mn) microsheets (with TC ~85 K) with
Jae-Hyun Lee, Seondo Park, Chanuk Yang, Hyung Kook Choi, Myung Rae Cho, Sung Un Cho, Yun Daniel Park   +6 more
doaj   +1 more source

Anisotropic Vapor HF etching of silicon dioxide for Si microstructure release

, 2012
Damages are created in a sacrificial layer of silicon dioxide by ion implantation to enhance the etch rate of silicon-dioxide in liquid and vapor phase hydrofluoric acid.
Bois, Bert Du, Dubois, Emmanuel, Hagberg, Mats, Krzeminski, Christophe, Nilsson, Bengt, Passi, Vikram, Petersson, Goran, Raskin, Jean-Pierre, Sodervall, Ulf   +8 more
core   +3 more sources

A novel fabrication process for capacitive cantilever structures for smart fabric applications [PDF]

, 2012
This paper reports, for the first time, capacitive freestanding cantilever beams fabricated by screen printing sacrificial and structural materials onto a fabric/textile.
Beeby, Steve, Torah, Russel, Tudor, John, Wei, Yang, Yang, Kai   +4 more
core  

Transcriptional network analysis of PTEN‐protein‐deficient prostate tumors reveals robust stromal reprogramming and signs of senescent paracrine communication

Molecular Oncology, EarlyView.
Combining PTEN protein assessment and transcriptomic profiling of prostate tumors, we uncovered a network enriched in senescence and extracellular matrix (ECM) programs associated with PTEN loss and conserved in a mouse model. We show that PTEN‐deficient cells trigger paracrine remodeling of the surrounding stroma and this information could help ...
Ivana Rondon‐Lorefice, Jose I. Lopez, Aitziber Ugalde‐Olano, Maite Zufiaurre, Ianire Astobiza, Natalia Martin‐Martin, Laura Bozal‐Basterra, Saioa Garcia‐Longarte, Amaia Zabala‐Letona, Sofia Rey, Aida Santos‐Martin, Miguel Unda, Ana Loizaga‐Iriarte, Mariona Graupera, Paolo Nuciforo, Arkaitz Carracedo, Isabel Mendizabal   +16 more
wiley   +1 more source

Surface micromachined electrostatically actuated micro peristaltic pump [PDF]

, 2004
An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be
Lin, Qiao, Shih, Jason, Tai, Yu-Chong, Xie, Jun, Yang, Bozhi   +4 more
core   +1 more source

Keratin 19 as a prognostic marker and contributing factor of metastasis and chemoresistance in high‐grade serous ovarian cancer

Molecular Oncology, EarlyView.
Keratin 19 (KRT19) is overexpressed in high‐grade serous ovarian cancer with high levels of Kallikrein‐related peptidases (KLK) 4–7 and is associated with poor survival. In vivo analyses demonstrate that elevated KRT19 increases peritoneal tumour burden.
Sophia Bielesch, Isabel Vogel, Sina Nokodian, Johanna Moeller, Antonia Blechschmidt, Vicky Hecht, Vanessa Kuentzel, Katharina Thiedig, Melissa Schwab, Oliver Schilling, Holger Bronger, Marion Kiechle, Viktor Magdolen, Tobias Dreyer   +13 more
wiley   +1 more source