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Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165), 2002
This paper gives a historical account of the development of Rayleigh-wave, or surface acoustic wave (SAW), devices for applications in electronics. The subject was spurred on initially by the requirements of pulse compression radar, and became a practical reality with the planar interdigital transducer, dating from 1965.
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This paper gives a historical account of the development of Rayleigh-wave, or surface acoustic wave (SAW), devices for applications in electronics. The subject was spurred on initially by the requirements of pulse compression radar, and became a practical reality with the planar interdigital transducer, dating from 1965.
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1997 IEEE MTT-S International Microwave Symposium Digest, 2002
This paper will discuss some of the technology approaches currently being pursued to extend the SAW device operating frequencies to the 1-6 GHz range. This range of frequencies has become commercially interesting in the past few years due to the large increase in wireless applications, especially cellular and mobile communications.
J.H. Kines, D.C. Malocha
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This paper will discuss some of the technology approaches currently being pursued to extend the SAW device operating frequencies to the 1-6 GHz range. This range of frequencies has become commercially interesting in the past few years due to the large increase in wireless applications, especially cellular and mobile communications.
J.H. Kines, D.C. Malocha
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New Piezoelectric Substrates for SAW Devices
International Journal of High Speed Electronics and Systems, 2000Recent developments in single crystal piezoelectric materials have focused on the search for "ideal" materials with zero temperature coefficient of frequency orientations featuring jointly high piezoelectric coupling, high intrinsic Q, zero power flow angle, and minimized diffraction effects.
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Proceedings of the IEEE, 1976
An analytical model is developed to determine the velocity of surface acoustic waves in strained media. It is shown that, in addition to the variations in path length, the SAW propagation may depend significantly on the velocity change with strain.
A.L. Nalamwar, M. Epstein
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An analytical model is developed to determine the velocity of surface acoustic waves in strained media. It is shown that, in addition to the variations in path length, the SAW propagation may depend significantly on the velocity change with strain.
A.L. Nalamwar, M. Epstein
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Fine lithography and saw devices
Microelectronic Engineering, 1984Abstract High performance filters in GHz range are required in communication systems. In this paper, the fine electrodes of the order or 0.2 μm width have been fabricated by using electron beam litho-graphy, normal lift-off techniques and O 2 -plasma cleaning system.
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SAW device application of diamond
Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium, 2002Polycrystalline diamond has emerged as a very promising material for high frequency surface acoustic wave (SAW) devices because it has a highest acoustic wave velocity amongst all materials. Theoretical studies with various types of piezoelectric materials were also performed.
S. Shikata +6 more
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SAW reflection characteristics of Cu electrodes and their application to SAW IF devices
2002 IEEE Ultrasonics Symposium, 2002. Proceedings., 2003This paper describes the application of copper (Cu) electrodes to SAW devices employing metal grating reflectors. It is shown both theoretically and experimentally that the metal grating made of Cu electrodes on 128/spl deg/YX LiNbO/sub 3/ gives much larger reflectivity than that made of Al electrodes of the same thicknesses. As one of the applications
T. Omori +5 more
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Impact of SAW device passivation on RF performance
1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027), 1999Passivation layers consisting of sputtered A12O3 have been deposited onto SAW devices for the purpose of reducing the incidence of shorts. A coupling-of-modes model was used with one-port resonators, coupled resonator filters (CRF), and test structures.
B W, Marks, D W, Sheddrick, S, Jen
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General Green's functions for SAW device analysis
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999The traditional Green's function has been widely used to analyze surface acoustic wave (SAW) devices for many years because of its physical basis and its ability to model many propagating modes. Simplifications are, however, introduced in the derivation of the traditional Green's function that cause it to ignore some important effects, such as mass ...
D, Qiao, W, Liu, P M, Smith
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GHz frequency ZnO/Si SAW device
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2008The demand for high-frequency low-loss filters generates intensive research on innovative wave guide solutions. In this work, a GHz SAW device based on a ZnO/Si structure was fabricated using classical UV photolithography. The thickness of the piezoelectric thin film was optimized and a specific interdigital transducer structure was used to generate ...
Laurent Le, Brizoual +5 more
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