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Scanning tunneling microscope combined with a scanning electron microscope
Review of Scientific Instruments, 1986We have developed a small scanning tunneling microscope (STM) to be incorporated into a scanning electron microscope (SEM). Vibration isolation and damping is achieved solely with Viton dampers. As a stand-alone unit, a tunnel-gap stability of about 1 Å is reached at atmospheric air pressure without additional sound protection. Stability improves by at
Ch Gerber, G Binnig, O Marti
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Autoradiography in the Scanning Electron Microscope
Nature, 1970THE results of electron microscopic examination of the structure of solids often need to be supplemented by tracing the chemical processes leading to particular structural features. This can be achieved by using radioisotopes, the distribution of which in the specimen can be determined well by autoradiography.
D, Paul, A, Gröbe, F, Zimmer
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The Scanning Electron Microscope
Scientific American, 1972T E, Everhart, T L, Hayes
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Combination of a scanning tunneling microscope with a scanning electron microscope
Review of Scientific Instruments, 1988We have placed a scanning tunneling microscope (STM) in the sample stage of a scanning electron microscope (SEM). This allows us to focus the tip on a preselected spot for STM operation with a precision of 0.5 μm. We are able to check the state of the sample and the tip during STM operation by simultaneous use of the SEM.
L. Vázquez +4 more
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Scanning tunneling microscope combined with scanning electron microscope
Ultramicroscopy, 1987Abstract A scanning tunneling microscope (STM) has been installed in a usual scanning electron microscope (SEM) with a vacuum of 10−6 Torr. The STM image is displayed on the cathode ray tube of the SEM, 512 × 512 pixels, with a scanning rate of 80 s/picture.
T. Ichinokawa, Y. Miyazaki, Y. Koga
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Collection of secondary electrons in scanning electron microscopes
Journal of Microscopy, 2009SummaryCollection of the secondary electrons in the scanning electron microscope was simulated and the results have been experimentally verified for two types of the objective lens and three detection systems. The aberration coefficients of both objective lenses as well as maximum axial magnetic fields in the specimen region are presented. Compared are
I, Müllerová, I, Konvalina
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Scan nonlinearity of a scanning electron microscope
Measurement Techniques, 2012The scan nonlinearity of scanning electron microscopes is estimated with the use of a relief element with known geometric form of the profile. The mean value of the step of the test relief structure, which is determined as a test sample is moved along the scanning axis X, is measured.
V. V. Alzoba +6 more
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The Scanning Electron Microscope
2005As we discussed in Chapter 1, the scanning electron microscope (SEM) was invented soon after the TEM but took longer to be developed into a practical tool for scientific research. As happened with the TEM, the spatial resolution of the instrument improved after magnetic lenses were substituted for electrostatic ones and after a stigmator was added to ...
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