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Virtual scanning electron microscope
SPIE Proceedings, 2013Application of virtual instruments to a process of measurements of geometrical characteristics of investigated objects is considered. Methods of construction of virtual instruments on a base of imitators and simulators are discussed. It is demonstrated, that a virtual scanning electron microscope (SEM) can be constructed only on the base of simulator ...
Yu. V. Larionov, Yu. A. Novikov
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Hitachi Scanning Electron Microscope
Proceedings, annual meeting, Electron Microscopy Society of America, 1968The demand for scanning electron microscopes is growing rapidly and exciting new fields of application have developed for this type of instrument. Hitachi, Ltd. has developed this type of instrument the details of which are described in this paper.A three stage demagnification lens system is used in the instrument.
T. Fujiyasu, K. Hara, H. Tamura
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Scanning electron microscope metrology
SPIE Proceedings, 1994During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high degree of precision. Optical microscopy, scanning electron microscopy and the various forms of scanning probe microscopies are major microscopical techniques used for submicrometer metrology ...
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The Scanning Electron Microscope
Scientific American, 1972T E, Everhart, T L, Hayes
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“Stereoscan” Scanning Electron Microscope
1967Based on principles developed by Prof. C.W. Oatley and colleagues at the Engineering Laboratories of Cambridge University, Cambridge, England, the Stereoscan scanning electron microscope is commercially manufactured by Cambridge Inst. Co., Ltd., Cambridge, England, and is marketed in the U.S. by Engis Equipment Oo., Morton Grove, Ill.
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