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Detectors for the scanning electron microscope
Journal of Physics E: Scientific Instruments, 1981Although the scintillator/photomultiplier combination is the detector most commonly used in the scanning electron microscope, it has been found advantageous for some purposes to derive the signal from the current passed by an insulated specimen to a operational amplifier with high-impedance input.
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Scanning electron microscope metrology
SPIE Proceedings, 1994During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high degree of precision. Optical microscopy, scanning electron microscopy and the various forms of scanning probe microscopies are major microscopical techniques used for submicrometer metrology ...
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The Scanning Electron Microscope
Scientific American, 1972Thomas L. Hayes, T. E. Everhart
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A Shielded Scanning Electron Microscope
Journal of Electron Microscopy, 1974Hidechiyo Kashihara +3 more
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“Stereoscan” Scanning Electron Microscope
1967Based on principles developed by Prof. C.W. Oatley and colleagues at the Engineering Laboratories of Cambridge University, Cambridge, England, the Stereoscan scanning electron microscope is commercially manufactured by Cambridge Inst. Co., Ltd., Cambridge, England, and is marketed in the U.S. by Engis Equipment Oo., Morton Grove, Ill.
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Transmission Kikuchi diffraction in a scanning electron microscope: A review
, 2016G. Sneddon, P. Trimby, J. Cairney
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, 2014 Electron probe microanalysis of minerals: Microanalyzer or scanning electron microscope?
, 2015Y. Lavrent’ev, N. Karmanov, L. Usova
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