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Relaxed SiGe-on-insulator fabricated by dry oxidation of sandwiched Si/SiGe/Si structure
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2005Paul Chu, Chenglu Lin
exaly
Interfaces and performance: What future for nanoscale Ge and SiGe based CMOS?
Microelectronic Engineering, 2011exaly

