Results 11 to 20 of about 123,450 (287)
Spontaneous direct bonding of thick silicon nitride [PDF]
, 1996 Wafers with LPCVD silicon-rich nitride layers have been successfully direct bonded to silicon-rich nitride and boron-doped silicon surfaces. A chemical - mechanical polishing treatment was necessary to reduce the surface roughness of the nitride before ...
Elwenspoek, M., Gui, C., Sanchez, S.
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Results in Materials, 2021 In this study, the nanometer lignin was mixed with the silicon nitride staring powders, and the mixed powder was pyrolyzed and sintered to obtain a novel composite material.
Wei Chen +4 more
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Superconducting Diamond on Silicon Nitride for Device Applications [PDF]
, 2018 Chemical vapour deposition (CVD) grown nanocrystalline diamond is an attractive material for the fabrication of devices. For some device architectures, optimisation of its growth on silicon nitride is essential.
Bland, Henry A. +7 more
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Highly efficient dual-level grating couplers for silicon nitride photonics
Scientific Reports, 2022 We propose and numerically demonstrate a versatile strategy that allows designing highly efficient dual-level grating couplers in different silicon nitride-based photonic platforms.
Valerio Vitali +4 more
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Process Development of Low-Loss LPCVD Silicon Nitride Waveguides on 8-Inch Wafer
Applied Sciences, 2023 Silicon nitride is a material compatible with CMOS processes and offers several advantages, such as a wide transparent window, a large forbidden band gap, negligible two-photon absorption, excellent nonlinear properties, and a smaller thermo-optic ...
Zhaoyi Li +6 more
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Silicon Nitride in Silicon Photonics [PDF]
Proceedings of the IEEE, 2018 The silicon nitride (Si3N4) planar waveguide platform has enabled a broad class of low-loss planar-integrated devices and chip-scale solutions that benefit from transparency over a wide wavelength range (400–2350 nm) and fabrication using wafer-scale processes.
Daniel J. Blumenthal +4 more
openaire +3 more sources
Silicon nitride and silica quarter-wave stacks for low-thermal-noise mirror coatings [PDF]
, 2018 This study investigates a multilayer high reflector with new coating materials for next-generation laser interferometer gravitational wave detectors operated at cryogenic temperatures.
Chang, Lin-An +6 more
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The deposition of silicon nitride films under low pressure on wafers up to 200 mm [PDF]
Технологія та конструювання в електронній апаратурі, 2012 The influence of silicon nitride deposition condition on parameters of the obtained films has been investigated. It has been found that the deposition rate of silicon nitride films decreases with deposition temperature decreasing, and at the same time ...
O. Yu. Nalivaiko, A. S. Turtsevich
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Near-infrared grating couplers for silicon nitride photonic wires [PDF]
, 2012 Silicon nitride is a promising high-index material for dense photonic circuits and applications in the visible-midinfrared wavelength regime. Design, fabrication, and optical characterization of silicon nitride waveguides at visible-near-infrared ...
Baets, Roel +5 more
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Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon [PDF]
, 2011 In this paper we present molecular dynamics simulations of silicon nitride, both in bulk and as an interface to crystalline silicon. We investigate, in particular, the bonding structure of the silicon nitride and analyze the simulations to search for de-
Butler, K.T. +3 more
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