By in-situ transmission electron microscopy (TEM), we performed a detailed study on the electron-beam radiation damage to nanostructured silicon nitride thin-film process layers in a typical semiconductor NVM device.
Binghai Liu +6 more
doaj +1 more source
Investigation of Intra-Nitride Charge Migration Suppression in SONOS Flash Memory
In order to suppress the intra-nitride charge spreading in 3D Silicon-Oxide-Nitride-Oxide-Silicon (SONOS) flash memory where the charge trapping layer silicon nitride is shared along the cell string, N2 plasma treated on the silicon nitride is proposed ...
Seung-Dong Yang +5 more
doaj +1 more source
Dispersion Optimization of Silicon Nitride Waveguides for Efficient Four-Wave Mixing
Silicon nitride waveguides have emerged as an excellent platform for photonic applications, including nonlinear optical signal processing, owing to their relatively high Kerr nonlinearity, negligible two photon absorption, and wide transparent bandwidth.
Yaping Hong +3 more
doaj +1 more source
Sealing of micromachined cavities using chemical vapor deposition methods: characterization and optimization [PDF]
This paper presents results of a systematic investigation to characterize the sealing of micromachined cavities using chemical vapor deposition (CVD) methods.
Liu, Chang, Tai, Yu-Chong
core +1 more source
Photonic Integrated Reconfigurable Linear Processors as Neural Network Accelerators
Reconfigurable linear optical processors can be used to perform linear transformations and are instrumental in effectively computing matrix–vector multiplications required in each neural network layer.
Lorenzo De Marinis +5 more
doaj +1 more source
Reliability analysis of structural ceramic components using a three-parameter Weibull distribution [PDF]
Described here are nonlinear regression estimators for the three-Weibull distribution. Issues relating to the bias and invariance associated with these estimators are examined numerically using Monte Carlo simulation methods.
Duffy, Stephen F. +2 more
core +3 more sources
High Thermal Conductivity of Silicon Nitride Ceramics: A Review
Silicon-nitride ceramic substrates exhibit high thermal conductivity, high electrical insulation, high mechanical strength, low expansion. The Cu-clad ceramic substrate is the key material for the encapsulation of insulated gate bipolar transistor ...
Yusen Duan +5 more
doaj +1 more source
Silicon Nitride Bearings for Total Joint Arthroplasty
The articulation performance of silicon nitride against conventional and highly cross-linked polyethylene, as well as for self-mated silicon nitride bearings, was examined in a series of standard hip simulation studies. Wear rates for polyethylene liners
Bryan J. McEntire +5 more
doaj +1 more source
Mesoporous fibrous silicon nitride by catalytic nitridation of silicon
[EN] The catalytic effect of metal oxide/alumina whiskers (CeO2,Mn3O4, NiO, Co3O4,Fe2O3,Cr2O3/AW) was eval-uated on their ability to drive the nitridation of silicon and to generate mesoporousfibrous silicon networks.Silicon powder with different particles size along with the catalyst was nitridized at 1300 °C for 5 h in nitrogenand nitrogen diluted ...
Minasyan, Tatevik +5 more
openaire +2 more sources
Improvement of piezoresistance properties of silicon carbide ceramics through co-doping of aluminum nitride and nitrogen [PDF]
The piezoresistance coefficient was measured on co-doped silicon carbide ceramics. Evaluation samples of alpha-silicon carbide ceramics were first fabricated by glass capsule HIP method using powder mixture of silicon carbide and aluminum nitride with ...
Hayashi, Hidetaka +2 more
core +1 more source

