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Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1997
exaly  

SILICON-ON-INSULATOR TRANSISTORS

1987
ABERNATHEY, JOHN ROBERT   +3 more
openaire   +2 more sources

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