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Silicon-on-Insulator Waveguides
2013While developed for the needs of microelectronics, the silicon-on-insulator (SOI) wafers are excellent substrates for optical waveguides. SOI is a kind of structures formed by a thin layer of crystalline silicon (Si) on an insulating layer, which typically is silicon dioxide (SiO2).
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Silicon carbide on insulator formation by the Smart-Cut® process
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1997Y le Tiec, F Letertre, C Jaussaud
exaly
Integration of Germanium-on-Insulator and Silicon MOSFETs on a Silicon Substrate
IEEE Electron Device Letters, 2006P B Griffin, J D Plummer
exaly
Formation of silicon islands on a silicon on insulator substrate upon thermal annealing
Applied Physics Letters, 2000Vincent Agache
exaly