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Silicon Photonics: silicon nitride versus silicon-on-insulator
Optical Fiber Communication Conference, 2016Silicon photonics typically builds on a silicon-on-insulator based high-index-contrast waveguide system. Silicon nitride provides an alternative moderate-index-contrast system that is manufacturable in the same CMOS environment. This paper discusses the relative benefits of both platforms.
Roel Baets +9 more
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Physics Bulletin, 1985
There has always been interest in the growth of silicon–on–insulators (soi), usually on sapphire, to give increased resistance to nuclear radiation for space and military applications. However, recently, new techniques for growth have been researched, and the silicon device interest has widened as the potential of insulating substrates for use with ...
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There has always been interest in the growth of silicon–on–insulators (soi), usually on sapphire, to give increased resistance to nuclear radiation for space and military applications. However, recently, new techniques for growth have been researched, and the silicon device interest has widened as the potential of insulating substrates for use with ...
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Measurement Techniques, 1983
Interference is among the commonest methods of measuring epitaxial film thicknesses [i, 2]. Spectrophotometers working in the visible and infrared regions are used [3]. The measurements involve determining the positions of the interference maxima in the reflection spectra. The effects of factors that influence the accuracy are closely known [4].
S. I. Stolyarov +4 more
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Interference is among the commonest methods of measuring epitaxial film thicknesses [i, 2]. Spectrophotometers working in the visible and infrared regions are used [3]. The measurements involve determining the positions of the interference maxima in the reflection spectra. The effects of factors that influence the accuracy are closely known [4].
S. I. Stolyarov +4 more
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Silicon-on-insulator technology
IEE Proceedings I Solid State and Electron Devices, 1986The last few years have seen considerable progress in the development of techniques for producing silicon-on-insulator (SOI) substrates suitable for fabrication of high performance devices/circuits. Among the most promising of the new ideas are those based on buried dielectric formation by ion implantation (oxygen or nitrogen), recrystallisation of ...
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Biosensors in silicon on insulator
SPIE Proceedings, 2009We present several nanophotonic biosensors on silicon-on-insulator: ring resonator based devices, slotted ring resonators to increase the interaction between light and the sample, and finally devices based on nanoplasmonic interferometers.
Peter Bienstman +6 more
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Silicon-on-insulator bipolar transistors
IEEE Electron Device Letters, 1983Thin-film lateral n-p-n bipolar transistors (BJT) have been fabricated in moving melt zone recrystallized silicon on a 0.5-µm silicon dioxide substrate thermally grown on bulk silicon. Current-voltage characteristics of devices with different base widths (5 and 10 µm) have been analyzed.
M. Rodder, D.A. Antoniadis
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Hydrogen annealed silicon-on-insulator
Applied Physics Letters, 1994Hydrogen annealing effects on silicon-on-insulator (SOI) materials are reported. High boron concentration of ∼2×1018/cm3 in 0.1-μm-thick SOI layer produced by bond and etch-back SOI (BESOI) method is reduced to ∼ 5×1015/cm3 by annealing at 1150 °C for 1 h.
Nobuhiko Sato, Takao Yonehara
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Silicon-on-Insulator Architectures for Brillouin scattering
Proceedings of the 2022 Conference on Lasers and Electro-Optics Pacific Rim, 2022We report Brillouin scattering gain in two novel Silicon-on-Insulator architectures – double slab and double-lobed waveguides. We show that the geometrical parameters influence the Brillouin gain and frequency shift, thereby offering flexibility to maximize gain.
B Om Subham +4 more
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1989
Bulk—Si technology is the technology which has obtained the most impressive results in the last 30 years. It is a mature and well established technology. However, as the demand for high speed, high density circuits increases, the technological processes are becoming more and more sophisticated.
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Bulk—Si technology is the technology which has obtained the most impressive results in the last 30 years. It is a mature and well established technology. However, as the demand for high speed, high density circuits increases, the technological processes are becoming more and more sophisticated.
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Silicon-on-Insulator Waveguides
2013While developed for the needs of microelectronics, the silicon-on-insulator (SOI) wafers are excellent substrates for optical waveguides. SOI is a kind of structures formed by a thin layer of crystalline silicon (Si) on an insulating layer, which typically is silicon dioxide (SiO2).
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