Results 181 to 184 of about 265,965 (184)
Some of the next articles are maybe not open access.
Extreme ultraviolet lithography: A review
Journal of Vacuum Science & Technology B, 2007Banqiu Wu
exaly
Exposure of 38 nm period grating patterns with extreme ultraviolet interferometric lithography
Applied Physics Letters, 1999H H Solak, X M Yang
exaly
Deep-Ultraviolet Biomolecular Imaging and Analysis
Advanced Optical Materials, 2019Yasuaki Kumamoto, Satoshi Kawata
exaly