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Harnessing Mode Conversion for Spurious Mode Suppression in AlN Laterally Vibrating Resonators

Journal of Microelectromechanical Systems, 2016
This paper reports on a spurious mode suppression technique for S0 mode aluminum nitride (AlN) laterally vibrating resonators. The technique utilizes a notch in the resonator body to convert spurious asymmetrical (A0) modes into the intended S0 mode vibration.
Anming Gao, Songbin Gong
semanticscholar   +4 more sources

Apodization technique for spurious mode suppression in AlN contour-mode resonators

Sensors and Actuators A: Physical, 2014
Abstract This paper reports on the application of apodization techniques to 900 MHz–1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1] , [2] , [3] , [4] , [5] , [6] ) to efficiently suppress spurious modes in close proximity of the main mechanical resonance.
Marco Giovannini   +3 more
semanticscholar   +4 more sources

Large-Range Spurious Mode Elimination for Wideband SAW Filters on LiNbO₃/SiO₂/Si Platform by LiNbO₃ Cut Angle Modulation

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2022
A LiNbO3 (LN)/SiO2/Si multilayered structure was recently reported as a new platform for achieving wideband radio frequency (RF) filters. However, the in-band ripples in filters resulting from the spurious Rayleigh mode lead to deteriorated performance ...
Huiping Xu   +9 more
semanticscholar   +3 more sources

Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36°-Cut Lithium Niobate

Journal of Microelectromechanical Systems, 2023
This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large $\boldsymbol {e}_{ \boldsymbol {16}}$ piezoelectric coefficient
Silvan Stettler, L. Villanueva
semanticscholar   +3 more sources

Spurious Mode Free Hexagonal PMUT Array

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019
This paper presents a hexagonal piezoelectric micromachined ultrasonic transducer (PMUT) array that can avoid spurious modes known to occur by mode coupling with adjacent elements. By designing an optimal hexagonal PMUT array with 10 µm spacing resulting in high fill-factor, we were able to experimentally demonstrate well-matched spurious mode free ...
Yuri Kusano   +2 more
openaire   +2 more sources

E-textile slot antenna with spurious mode suppression and low SAR for medical wearable applications

Journal of Electromagnetic Waves and Applications, 2021
In this paper, electronic textile (E-textile) antenna design, with spurious mode suppression and low specific absorption rate (SAR), at a nearest distance of 1 mm from on-body phantom is investigated.
Arpan H. Shah, P. Patel
semanticscholar   +3 more sources

AlN/Al0.8Sc0.2N film S mode lamb wave resonator with spurious mode suppression

Journal of Applied Physics, 2022
High-performance Lamb wave devices have a vast application prospect in modern wireless communication systems. This paper proposes a method of spurious mode suppression by reducing the overlap length of electrodes according to modal shapes. The AlN/Al0.8Sc0.2N composite film is used to achieve a trade-off between electromechanical coupling coefficient ...
Qinwen Xu   +6 more
openaire   +2 more sources

Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes

IEEE Electron Device Letters, 2023
Spurious modes (SMs) suppression and electromechanical coupling coefficient ( ${k}_{t}^{{2}}$ ) improvement in Lamb wave resonators (LWRs) have always been the research hotspot.
T. Luo   +8 more
semanticscholar   +3 more sources

Spurious Mode Free 3.5GHz AlN Plate Mode Resonator with High FoM

2018 IEEE International Ultrasonics Symposium (IUS), 2018
This work reports a spurious mode free AlN plate mode resonator with high figure-of-merit (FoM) operating at 3.5GHz. The reported resonator, which comprises of two sets of $0.27\ \mu \text{m}$ -thick top molybdenum (Mo) interdigitated electrodes (IDE) fingers attached to a layer of $1\ \mu \text{m}$ -thick AlN, has an IDE pitch $(p)$ of 1m and a ...
Nan Wang   +6 more
openaire   +2 more sources

Balanced bandpass filter with spurious mode suppression

Microwave and Optical Technology Letters, 2017
ABSTRACTThis article presents a new and simple design approach for the balanced bandpass filter (BPF) with spurious mode suppression using half‐wavelength resonators. The second harmonic of the resonator, acting as the lowest‐frequency common‐mode (CM) noise, is suppressed by using a new differential feeding scheme. Furthermore, an electrically coupled
Yun‐Li Li   +4 more
openaire   +2 more sources

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