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Harnessing Mode Conversion for Spurious Mode Suppression in AlN Laterally Vibrating Resonators
Journal of Microelectromechanical Systems, 2016This paper reports on a spurious mode suppression technique for S0 mode aluminum nitride (AlN) laterally vibrating resonators. The technique utilizes a notch in the resonator body to convert spurious asymmetrical (A0) modes into the intended S0 mode vibration.
Anming Gao, Songbin Gong
semanticscholar +4 more sources
Apodization technique for spurious mode suppression in AlN contour-mode resonators
Sensors and Actuators A: Physical, 2014Abstract This paper reports on the application of apodization techniques to 900 MHz–1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1] , [2] , [3] , [4] , [5] , [6] ) to efficiently suppress spurious modes in close proximity of the main mechanical resonance.
Marco Giovannini +3 more
semanticscholar +4 more sources
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2022
A LiNbO3 (LN)/SiO2/Si multilayered structure was recently reported as a new platform for achieving wideband radio frequency (RF) filters. However, the in-band ripples in filters resulting from the spurious Rayleigh mode lead to deteriorated performance ...
Huiping Xu +9 more
semanticscholar +3 more sources
A LiNbO3 (LN)/SiO2/Si multilayered structure was recently reported as a new platform for achieving wideband radio frequency (RF) filters. However, the in-band ripples in filters resulting from the spurious Rayleigh mode lead to deteriorated performance ...
Huiping Xu +9 more
semanticscholar +3 more sources
Journal of Microelectromechanical Systems, 2023
This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large $\boldsymbol {e}_{ \boldsymbol {16}}$ piezoelectric coefficient
Silvan Stettler, L. Villanueva
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This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large $\boldsymbol {e}_{ \boldsymbol {16}}$ piezoelectric coefficient
Silvan Stettler, L. Villanueva
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Spurious Mode Free Hexagonal PMUT Array
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019This paper presents a hexagonal piezoelectric micromachined ultrasonic transducer (PMUT) array that can avoid spurious modes known to occur by mode coupling with adjacent elements. By designing an optimal hexagonal PMUT array with 10 µm spacing resulting in high fill-factor, we were able to experimentally demonstrate well-matched spurious mode free ...
Yuri Kusano +2 more
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E-textile slot antenna with spurious mode suppression and low SAR for medical wearable applications
Journal of Electromagnetic Waves and Applications, 2021In this paper, electronic textile (E-textile) antenna design, with spurious mode suppression and low specific absorption rate (SAR), at a nearest distance of 1 mm from on-body phantom is investigated.
Arpan H. Shah, P. Patel
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AlN/Al0.8Sc0.2N film S mode lamb wave resonator with spurious mode suppression
Journal of Applied Physics, 2022High-performance Lamb wave devices have a vast application prospect in modern wireless communication systems. This paper proposes a method of spurious mode suppression by reducing the overlap length of electrodes according to modal shapes. The AlN/Al0.8Sc0.2N composite film is used to achieve a trade-off between electromechanical coupling coefficient ...
Qinwen Xu +6 more
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Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes
IEEE Electron Device Letters, 2023Spurious modes (SMs) suppression and electromechanical coupling coefficient ( ${k}_{t}^{{2}}$ ) improvement in Lamb wave resonators (LWRs) have always been the research hotspot.
T. Luo +8 more
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Spurious Mode Free 3.5GHz AlN Plate Mode Resonator with High FoM
2018 IEEE International Ultrasonics Symposium (IUS), 2018This work reports a spurious mode free AlN plate mode resonator with high figure-of-merit (FoM) operating at 3.5GHz. The reported resonator, which comprises of two sets of $0.27\ \mu \text{m}$ -thick top molybdenum (Mo) interdigitated electrodes (IDE) fingers attached to a layer of $1\ \mu \text{m}$ -thick AlN, has an IDE pitch $(p)$ of 1m and a ...
Nan Wang +6 more
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Balanced bandpass filter with spurious mode suppression
Microwave and Optical Technology Letters, 2017ABSTRACTThis article presents a new and simple design approach for the balanced bandpass filter (BPF) with spurious mode suppression using half‐wavelength resonators. The second harmonic of the resonator, acting as the lowest‐frequency common‐mode (CM) noise, is suppressed by using a new differential feeding scheme. Furthermore, an electrically coupled
Yun‐Li Li +4 more
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