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Spurious Mode Free 3.5GHz AlN Plate Mode Resonator with High FoM
IUS, 2018This work reports a spurious mode free AlN plate mode resonator with high figure-of-merit (FoM) operating at 3.5GHz. The reported resonator, which comprises of two sets of $0.27\ \mu \text{m}$-thick top molybdenum (Mo) interdigitated electrodes (IDE ...
Nan Wang +6 more
semanticscholar +1 more source
IUS, 2018
This paper presents an apodization technique to suppress spurious modes in aluminum nitride (AlN) lamb wave resonators. The apodization pattern proposed is a 5-vertex irregular polygon shape.
Yao Zhu +6 more
semanticscholar +1 more source
This paper presents an apodization technique to suppress spurious modes in aluminum nitride (AlN) lamb wave resonators. The apodization pattern proposed is a 5-vertex irregular polygon shape.
Yao Zhu +6 more
semanticscholar +1 more source
Spurious mode distinguish by modal response contribution index in eigensystem realization algorithm
, 2018Chun-Xu Qu +3 more
semanticscholar +1 more source
Evanescent-mode bandpass filter using D-shaped slotlines for spurious harmonic suppression
Microwave and Optical Technology Letters, 2023Peng Chen
exaly
Spurious mode distinguish by eigensystem realization algorithm with improved stabilization diagram
, 2017Chun-Xu Qu +3 more
semanticscholar +1 more source
Spurious mode suppression in SH0 Lithium Niobate laterally vibrating MEMS resonators
International Electron Devices Meeting, 2015Yong-Ha Song, Song-Bin Gong
semanticscholar +1 more source

