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A perspective of magnetron sputtering in surface engineering
Surface and Coatings Technology, 1999J Musil, J Vlček
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Sputtering thin films: Materials, applications, challenges and future directions
Advances in Colloid and Interface ScienceMohsen Ahmadipour +2 more
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High power impulse magnetron sputtering discharge
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2012J T Gudmundsson +2 more
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