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Transparent conducting p-type NiO thin films prepared by magnetron sputtering
, 1993Hirotoshi Sato +3 more
semanticscholar +1 more source
An introduction to thin film processing using high-power impulse magnetron sputtering
, 2012D. Lundin, K. Sarakinos
semanticscholar +1 more source
Fundamental understanding and modeling of reactive sputtering processes
, 2005S. Berg, T. Nyberg
semanticscholar +1 more source