Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching [PDF]
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process.
Ali Z. Khokhar +7 more
core +2 more sources
Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques
A high Q-factor (quality-factor) spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process was investigated. The spiral inductor is manufactured on a silicon substrate.
Ming-Zhi Yang +2 more
doaj +1 more source
Transparent conducting films of CdSe(ZnS) core(shell) quantum dot xerogels [PDF]
A method of fabricating sol–gel quantum dot (QD) films is demonstrated, and their optical, structural and electrical properties are evaluated. The CdSe(ZnS) xerogel films remain quantum confined, yet are highly conductive (10−3 S cm−1).
Brock, Stephanie L +2 more
core +2 more sources
Epitaxial piezoelectric α‐quartz/Si BioNEMS sensors, made using soft chemistry, effectively detect the Chikungunya virus. They have a mass sensitivity of 205 pg Hz−1 in liquid and can detect the virus at a limit of 9 ng mL−1. This development enables high‐frequency mass devices for point‐of‐care testing in healthcare and other electronic applications ...
Raissa Rathar +12 more
wiley +1 more source
Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices
Heavily boron-doped silicon layers and boron etch-stop techniques have been widely used in the fabrication of microelectromechanical systems (MEMS).
Zhe Ma +10 more
doaj +1 more source
Metabolic Processes Preserved as Biosignatures in Iron-Oxidizing Microorganisms: Implications for Biosignature Detection on Mars [PDF]
Iron-oxidizing bacteria occupy a distinct environmental niche. These chemolithoautotrophic organisms require very little oxygen (when neutrophilic) or outcompete oxygen for access to Fe(II) (when acidophilic).
Emerson, David +3 more
core +1 more source
Room Temperature InP DFB Laser Array Directly Grown on (001) Silicon
Fully exploiting the silicon photonics platform requires a fundamentally new approach to realize high-performance laser sources that can be integrated directly using wafer-scale fabrication methods.
Absil, Philippe +7 more
core +1 more source
A new analytical procedure, tetramethylammonium hydroxide thermochemolysis, was used to structurally characterize a variety of bio-and geo-polymers. The technique cleaves esters and some ethers in macromolecular organic matter, yielding low-molecular-mass monomers such as methyl esters of carboxylic acids and methyl ethers of alcohols that are amenable
Río Andrade, José Carlos del +5 more
openaire +2 more sources
Wet‐Chemical Etching of Silicon Wafer Surfaces Using Aqueous HF‐HBrO3 and HF‐HBrO3‐Br2 Solutions
Aqueous mixtures of HF and HBrO3 are reported as a new NOx‐free etching systems for monocrystalline silicon wafers. Silicon is polished with etching rates up to 10 µm min−1 at room temperature. The addition of Br2 leads to anisotropic etching, thus texturing monocrystalline silicon wafer surfaces with upright pyramids.
Nils Schubert +7 more
wiley +1 more source
Evolution of Si Crystallographic Planes-Etching of Square and Circle Patterns in 25 wt % TMAH
Squares and circles are basic patterns for most mask designs of silicon microdevices. Evolution of etched Si crystallographic planes defined by square and circle patterns in the masking layer is presented and analyzed in this paper.
Milče M. Smiljanić +4 more
doaj +1 more source

