Results 91 to 100 of about 9,007 (253)
Recent Advances in Plasma‐Enhanced Atomic Layer Etching for Next‐Generation Nanofabrication
Continued semiconductor miniaturization demands atomic‐scale patterning and ultralow surface roughness beyond the capabilities of conventional reactive ion etching. This review highlights advances in isotropic and anisotropic plasma‐enhanced atomic layer etching since 2020, covering fundamental mechanisms, applications across major semiconductor ...
Shih‐Nan Hsiao
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Thermoplastic attachment is introduced as a scalable surface coating strategy to improve the durability and dielectric reliability of flexible electrodynamic dust shields. By embedding chemically modified reduced graphene oxide (CMrGO) electrodes within thermoplastic laminates, mechanical degradation, abrasion damage, and vacuum‐induced electrical ...
Ide E. Onal +6 more
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Recent Advances of Slip Sensors for Smart Robotics
This review summarizes recent progress in robotic slip sensors across mechanical, electrical, thermal, optical, magnetic, and acoustic mechanisms, offering a comprehensive reference for the selection of slip sensors in robotic applications. In addition, current challenges and emerging trends are identified to advance the development of robust, adaptive,
Xingyu Zhang +8 more
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Introduction. Modern radio engineering systems impose strict requirements on the stability of the frequency of microwave oscillation sources (microwave generators) included in their composition. However, microwave oscillators (on dielectric resonators or
V. A. Loiko, A. R. Safin, A. A. Boburkov
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Hierarchical multi‐material TPMS lattices are engineered as flexible tactile sensors by combining soft and stiff elastomeric layers with a conformal conductive coating. The bilayer architecture delivers sensitivity at low pressures while maintaining a broad detectable range under large loads, enabling reliable pressure and vibration monitoring for ...
Reza Noroozi +3 more
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Accurate and stable local oscillation is essential in high-speed RF communication systems, imposing strict performance requirements on LC-voltage-controlled oscillators (LC-VCOs).
Dereddy Anuradha +2 more
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Microfabrication of Soft Millirobots Propelled by Low Voltage Electrohydraulic Actuators
Manual layer‐by‐layer assembly is replaced by wafer‐level MEMS batch fabrication for compliant polymer‐based electrohydraulic actuators. The microfabricated devices integrate sacrificially defined microcavities, Parylene‐C‐sealed inlets, and multilayer polymer–metal films.
Shai Shmulevich +2 more
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Optoelectronic Oscillators: Progress from Classical Designs to Integrated Systems
Optoelectronic oscillators (OEOs) have emerged as indispensable tools for generating low-phase-noise microwave and millimeter-wave signals, which are critical for a variety of high-performance applications.
Qidi Liu, Jiuchang Peng, Juanjuan Yan
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The dual‐gate coplanar a‐IGZO/C‐IGO/a‐IGZO TFT is investigated, exhibiting a high filed‐effect mobility of 53.81 cm2 V−1s−1 with excellent stability. The amorphous IGZO layer provides smooth surface, which carrier scattering and high‐quality interface between gate insulator and active layer.
Solbee Lee +4 more
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In order to improve the off-state and breakdown characteristics of double-channel GaN HEMTs, an ultra-thin barrier layer was chosen as the second barrier layer.
Qian Yu +11 more
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