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Depth resolution of TOF-ERDA using a He beam
Nuclear Instruments & Methods in Physics Research B, 2011Abstract Depth resolution of time-of-flight ERDA using a 4He beam (He TOF-ERDA) has been studied. The measurement system consists of a time detector of the ion transmission type and a silicon surface-barrier detector. Depth resolution was measured using samples of carbon layers on silicon wafers and 4He beams with energies between 3.5 and 10.1 MeV ...
Keisuke Yasuda, R Ishigami
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