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Quantitative analysis of hydrogen in thin films using TOF ERDA spectroscopy

Thin solid films, 2010
Determination of atomic concentrations in thin films is one of key problems in materials science. Time-of-Flight Elastic Recoil Detection Analysis (TOF ERDA) is a powerful method for depth profiling of light and medium mass elements in near surface layers of material.
Jakšić, Milko   +2 more
openaire   +2 more sources

Application of μRBS/ERDA system in microstructured devices

Nuclear Instruments & Methods in Physics Research B, 2021
Shigeo Matsuyama, S Toyama
exaly  

Development of a high mass-resolution TOF-ERDA system for a wide mass range

Nuclear Instruments & Methods in Physics Research B, 1997
Shinjiro Hayakawa   +2 more
exaly  

Light element analysis in amorphous and nanocrystalline silicon using ERDA and related techniques

2006
In this work, investigation of light elements incorporated in the amorphous silicon network of hydrogenated and nanocrystalline silicon were analysed by using ion beam analytical techniques. To do this, amorphous silicon films were deposited by hot wire chemical vapour deposition, and a unique sampling method was developed for the analysis of ...
openaire   +1 more source

Development of an in-air ERDA system for hydrogen analysis

Nuclear Instruments & Methods in Physics Research B, 2019
Kohtaku Suzuki
exaly  

Development of external coincidence ERDA: Hydrogen analysis of moist samples

Nuclear Instruments & Methods in Physics Research B, 2019
Masahiro Saito, H Hofsäss
exaly  

Intensity calibration of an FT-IR spectrometer by heavy-ion ERDA

Nuclear Instruments & Methods in Physics Research B, 2004
Marcus Bar, Erik Strub, W Bohne
exaly  

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