微电子技术与光电子技术紧密结合,相互渗透,必将推进信息技术及相关的高新技术进入新的发展阶段。本书共分为9章,从技术基础和实际应用的角度出发,着重对微电子与光电子集成技术相关的工艺基础、基本原理和关键集成技术进行了详细阐述,主要内容包括光发射器件、光电探测器、光波导器件、光电子专用集成电路、硅基光电子集成回路、甚短距离光传输技术以及微电子与光电子混合集成技术等。 微电子与光电子集成技术的实用化进程,必将为21世纪科学技术的发展作出重大贡献。然而,微电子与光电子集成技术是信息技术发展的一个崭新方向 ...
陈弘达
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