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Perovskite Thin Films via Atomic Layer Deposition
Advanced Materials, 2015Brandon R Sutherland +2 more
exaly
Plasma atomic layer deposition
Plasma atomic layer deposition (ALD) is optimized through modulation of the gas residence time during an excited species phase, wherein activated reactant is supplied such as from a plasma. Reduced residence time increases the quality of the deposited layer, such as reducing wet etch rates, increasing index of refraction and/or reducing impurities in ...Knoops, H.C.M. +2 more
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2016 14th International Baltic Conference on Atomic Layer Deposition (BALD), 2016
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High‐Speed Spatial Atomic‐Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
Advanced Materials, 2010Paul Poodt, Fred Roozeboom, Hardik Jain
exaly
Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
Angewandte Chemie - International Edition, 2003Markku Leskela, Mikko Ritala
exaly

