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High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation
Advanced Materials, 2010C I M A Spee +2 more
exaly
TiO2 Inverse Opals Fabricated Using Low-Temperature Atomic Layer Deposition
Advanced Materials, 2005Elton Graugnard, J S King, C J Summers
exaly
New development of atomic layer deposition: processes, methods and applications
Science and Technology of Advanced Materials, 2019Peter Ozaveshe Oviroh +2 more
exaly
PRECURSORS FOR ATOMIC LAYER DEPOSITION
2013WINTER CHARLES H, KALUTARAGE LAKMAL C
openaire +2 more sources

