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Future Directions in Atomic Layer Deposition (ALD) for Battery Production
James Ayodele Oke +5 moreopenaire +1 more source
Electrical properties of atomic layer deposited (ALD) TiO2 films
2006Saarilahti, Jaakko +2 more
openaire +1 more source
Precursors for ALD processes, In: Atomic Layer Deposition of Nanostructured Materials
2012openaire +2 more sources