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Gas Transport Optimization for Atomic Layer Deposition Processes (ALD)

2021
[ES] El proyecto se centra en la optimización del flujo en procesos ALD. Para ello se pretenden mejorar tanto el tiempo de un ciclo completo como la uniformidad de la capa depositada. El método de optimización se desarrollará haciendo uso de un benchmark validable y, posteriormente, será aplicado al reactor ALD. Mediante el software CFD Ansys Fluent se
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Atomic Layer Deposition (ALD)

2012
Antonio Aliano +43 more
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Elaboration of advanced photocatalytic materials by Atomic layer Deposition (ALD)

Élaboration de matériaux photocatalytiques par dépôt de couches atomiques (ALD) En raison de la contamination croissante de nos ressources en eau naturelles par une large gamme de micropolluants organiques (PMO), il est nécessaire de développer de nouveaux procédés d'oxydation avancés économes en énergie pour le traitement des eaux ...
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Atomic layer deposition (ALD) assisting the visibility of metal-organic frameworks (MOFs) technologies

Coordination Chemistry Reviews, 2021
Jianwei Ren, Tien-Chien Jen
exaly

Atomic layer deposition (ALD): from precursors to thin film structures

Thin Solid Films, 2002
Markku Antero Leskelä, Mikko Kalervo Ritala +1 more
exaly

Atomic Layer Deposition (ALD)

2015
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Formation of Micro- and Nanostructures on the Nanotitanium Surface by Chemical Etching and Deposition of Titania Films by Atomic Layer Deposition (ALD)

Materials, 2015
Denis Nazarov, Vladimir Smirnov, Elena Zemtsova +2 more
exaly

Controlled Electrochemical Formation of GexSbyTez using Atomic Layer Deposition (ALD)

Chemistry of Materials, 2011
John Stickney +2 more
exaly

ATOMIC LAYER DEPOSITION (ALD) FOR MULTI-LAYER CERAMIC CAPACITORS (MLCCs)

2021
HIGGS DANIEL +7 more
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