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Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
Advanced Materials, 2007Mato Knez, Kornelius Nielsch
exaly
ALD: Atomic Layer Deposition, Precise and Conformal Coating for Better Performance
2013openaire +1 more source
Dynamic Modeling for the Design and Cyclic Operation of an Atomic Layer Deposition (ALD) Reactor
Processes, 2013exaly
Atomic layer deposition (ALD) of palladium: from processes to applications
Critical Reviews in Solid State and Materials SciencesClement Lausecker +2 more
exaly

