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Black silicon integrated aperture
Journal of Micro/Nanolithography, MEMS, and MOEMS, 2017This paper describes the incorporation of nanotextured black silicon as an optical absorbing material into silicon-based micro-optoelectromechanical systems devices to reduce stray light and increase optical contrast during imaging. Black silicon is created through a maskless dry etch process and characterized for two different etch conditions, a cold ...
David L. Dickensheets, Tianbo Liu
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Electrical properties of black silicon
SPIE Proceedings, 2012Black silicon thin films with supersaturated heavily doped sulfur were fabricated on silicon substrates through femtosecond laser scanning the silicon substrate surface in SF6 atmosphere. The temperature characteristics of the carrier concentration and mobility of the two-layer structure, black silicon films/silicon substrate, were measured with ...
Zhengxi Cheng, Yongping Chen, Bin Ma
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Wide-band “black silicon” based on porous silicon
Applied Physics Letters, 2006Solar cells and optical detection devices often incorporate antireflective surfaces to reduce undesired reflection and enhance optical absorption. This letter reports a “black silicon” structure of antireflective porous silicon fabricated by using electrochemical etching.
L. L. Ma +8 more
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Coatings of the “Black-Silicon” type for silicone solar cells
2016 13th International Conference on Modern Problems of Radio Engineering, Telecommunications and Computer Science (TCSET), 2016Prospects for preparation of functional “Black Si” multi-layered anti-reflective coating (ARC) of the frontal surface by the electrochemical etching were shown. Both creation of geometrical model of the “Black Si” coating with discreet non-uniformity of a refraction coefficient and technological aspects of the “Black Si” type were described.
Valerij Yerokhov, Olga Ierokhova
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Surface analysis and process optimization of black silicon
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2012This paper puts forward a description method for surface topography of black silicon using SF 6 /C 4 F 8 in a cyclic etching-passivation DRIE process. Three main parameters, i.e. density, height and width, are defined and used to describe black silicon and can be extended to several other parameters, such as aspect ratio, duty ratio and so on.
Fu-Yun Zhu +5 more
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Electrowetting Properties of Micro/Nanostructured Black Silicon
Langmuir, 2010This paper reports on the electrowetting on dielectric (EWOD) properties of dual rough black silicon (Si) surfaces, produced by pulsed laser structuring of Si wafers and subsequently coating with a thermally grown oxide and a chloroalkylsilane layer. By varying the laser fluence, it was possible to tune the black Si wettability, from hydrophobicity to ...
Marios, Barberoglou +4 more
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Optical Annealing of Black Silicon
2014Silicon hyperdoped with chalcogens using femtosecond (fs) laser irradiation (“black silicon”) shows strong broad-band absorption due to intermediate band formation and surface texturing; thus, this material has promise for advanced optoelectronic devices such as silicon-based infrared photodetectors and intermediate band solar cells.
Benjamin Franta +3 more
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Monolithic perovskite/black-silicon tandems based on tunnel oxide passivated contacts
Joule, 2022Zhiqin Ying +2 more
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Cancer statistics for African American/Black People 2022
Ca-A Cancer Journal for Clinicians, 2022Angela Giaquinto +2 more
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