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On-chip particle levitation and micromanipulation using bulk acoustic waves.

open access: yesLab Chip
Vuille-Dit-Bille E   +9 more
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Materials for bulk acoustic wave (BAW) resonators and filters

Journal of the European Ceramic Society, 2001
Abstract Thin film bulk acoustic wave (BAW) resonators and filters are appropriate for mobile communication systems operating at high frequencies between 1–10 GHz. The resonance frequency is mainly determined by the thickness of the piezoelectric layer.
H.P. Löbl   +6 more
openaire   +3 more sources

Thin film piezoelectrics for bulk acoustic wave (BAW) acoustophoresis

Lab on a Chip, 2018
Design, fabrication and characterization of thin film piezoelectric devices for bulk acoustic wave acoustophoresis of micrometer-sized particles.
Peter Reichert   +3 more
openaire   +4 more sources

Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators

Materials Chemistry and Physics, 2003
Abstract Thin film bulk acoustic wave (BAW) resonators and filters are well suited for mobile communication systems operating at high frequencies between 0.5 and 10 GHz. Piezoelectric thin film materials investigated for BAW devices within Philips include AlN thin films.
H.P Loebl   +5 more
openaire   +3 more sources

Wafer-level-package for bulk acoustic wave (BAW) filters

2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), 2004
Silicon based Bulk-Acoustic-Wave (BAW) filters utilize mainstream wafer processing and can create significant customer benefit in terms of cost, performance and size. Similar to conventional SAW filters the package is a dominant cost contributor as long as ceramic cavity packages are used. For both SAW and BAW the active area may not be coated with any
M. Franoseb   +4 more
openaire   +1 more source

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