Micro/Nanoscale Acoustic Manipulation: From Particle Control to Autonomous Microswimmers [PDF]
Advanced Science, Volume 13, Issue 55, 5 October 2026.This conceptual framework illustrates acoustic technology as a multifunctional platform enabling passive particle manipulation across scales and autonomous propulsion of microswimmers. ABSTRACT Acoustic manipulation and propulsion technologies have emerged as powerful platforms for micro/nanoscale control, enabled by their non‐contact operation, label ...
Jiahui Chu +4 more
wiley +2 more sources
Recent Advances in AlN-Based Acoustic Wave Resonators [PDF]
MicromachinesAlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size.
Hao Lu +7 more
doaj +2 more sources
Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators [PDF]
Micromachines, 2023 Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the ...
Carlos Udaondo +2 more
doaj +2 more sources
Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT [PDF]
Microsystems & Nanoengineering, 2023 Considering the evolution of rotation sensing and timing applications realized in micro-electro-mechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both ...
Ozan Erturk +4 more
doaj +2 more sources
Acoustofluidic Biosensors [PDF]
MicromachinesThe rapid and precise detection of biomarkers and pathogens remains a critical challenge in clinical diagnostics. Traditional methodologies are frequently hindered by protracted workflows, complex sample preparation, and reliance on resource-intensive ...
Chun-Jui Chen +2 more
doaj +2 more sources
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator [PDF]
Microsystems & NanoengineeringThe high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW) resonators have significantly advanced their application in sensing technologies.
Xiyu Gu +8 more
doaj +2 more sources
Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes [PDF]
Microsystems & Nanoengineering, 2023 In this paper, a modification to the eigenmode operation of resonant gyroscopes is introduced. The multi-coefficient eigenmode operation can improve cross-mode isolation due to electrode misalignments and imperfections, which is one of the causes of ...
Zhenming Liu, Haoran Wen, Farrokh Ayazi
doaj +2 more sources
High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure [PDF]
SensorsBulk acoustic wave (BAW) resonators, with their exceptional high-frequency performance and excellent quality factor, have become a key driver of advances in sensing technology.
Wanqing Zuo +6 more
doaj +2 more sources
Towards the Optimization of Apodized Resonators [PDF]
MicromachinesBulk Acoustic Wave (BAW) resonators are essential components in modern RF communication systems due to their high selectivity and quality factor. However, spurious resonances caused by Lamb wave mode propagation along the in-plane directions degrade the ...
Ana Valenzuela-Pérez +2 more
doaj +2 more sources
The 3.4 GHz BAW RF Filter Based on Single Crystal AlN Resonator for 5G Application
Nanomaterials, 2022 To meet the stringent requirements of 5G communication, we proposed a high-performance bulk acoustic wave (BAW) filter based on single crystal AlN piezoelectric films on a SiC substrate.
Hao Jin, Weipeng Xuan, Shurong Dong
exaly +3 more sources