Quasi-3D Model for Lateral Resonances on Homogeneous BAW Resonators [PDF]
Micromachines, 2023 Lateral modes are responsible for the in-band spurious resonances that appear on BAW resonators, degrading the in-band filter response. In this work, a fast computational method based on the transmission line matrix (TLM) method is employed to model the ...
Carlos Udaondo +2 more
doaj +8 more sources
Recent Advances in AlN-Based Acoustic Wave Resonators [PDF]
MicromachinesAlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size.
Hao Lu +7 more
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Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT [PDF]
Microsystems & Nanoengineering, 2023 Considering the evolution of rotation sensing and timing applications realized in micro-electro-mechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both ...
Ozan Erturk +4 more
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Effects of geometry on quantum fluctuations of phonon-trapping acoustic cavities
New Journal of Physics, 2014 This work presents some peculiarities of the near quantum ground state behaviour of curved (phonon trapping) bulk acoustic wave (BAW) cavities when compared to a conventional mechanical resonator.
Maxim Goryachev, Michael E Tobar
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Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator [PDF]
Microsystems & NanoengineeringThe high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW) resonators have significantly advanced their application in sensing technologies.
Xiyu Gu +8 more
doaj +2 more sources
Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes [PDF]
Microsystems & Nanoengineering, 2023 In this paper, a modification to the eigenmode operation of resonant gyroscopes is introduced. The multi-coefficient eigenmode operation can improve cross-mode isolation due to electrode misalignments and imperfections, which is one of the causes of ...
Zhenming Liu, Haoran Wen, Farrokh Ayazi
doaj +2 more sources
Applied Sciences, 2018 A quartz Bulk Acoustic Wave resonator is designed to coherently trap phonons in such a way that they are well confined and immune to suspension losses so they exhibit extremely high acoustic Q-factors at low temperature, with Q × f products of ...
Maxim Goryachev +3 more
doaj +4 more sources
Towards the Optimization of Apodized Resonators [PDF]
MicromachinesBulk Acoustic Wave (BAW) resonators are essential components in modern RF communication systems due to their high selectivity and quality factor. However, spurious resonances caused by Lamb wave mode propagation along the in-plane directions degrade the ...
Ana Valenzuela-Pérez +2 more
doaj +2 more sources
High-Sensitivity Solidly Mounted Resonator Load Sensor Based on AlN/AlScN Heterostructure [PDF]
SensorsBulk acoustic wave (BAW) resonators, with their exceptional high-frequency performance and excellent quality factor, have become a key driver of advances in sensing technology.
Wanqing Zuo +6 more
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Nonlinear Performance of BAW Filters Including BST Capacitors [PDF]
Radioengineering, 2014 This paper evaluates the nonlinear effects occurring in a bulk acoustic wave (BAW) filter which includes barium strontium titanate (BST) capacitors to cancel the electrostatic capacitance of the BAW resonators.
E. Rocas +7 more
doaj +2 more sources