Results 1 to 10 of about 9,207 (319)
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride [PDF]
Journal of microelectromechanical systems, 2023 This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency scaling sputtered ScAlN into mmWave and proposes a stack and new ...
Sinwoo Cho +13 more
semanticscholar +3 more sources
An Investigation on Efficient Acoustic Energy Reflection of Flexible Film Bulk Acoustic Resonators
Nanotechnology and Precision Engineering, 2018 : This paper investigates the issues on acoustic energy reflection of flexible film bulk acoustic resonators (FBARs). The flexible FBAR was fabricated with an air cavity in the polymer substrate, which endowed the resonator with efficient acoustic ...
Chuanhai Gao +4 more
doaj +2 more sources
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride Using Platinum Electrodes [PDF]
IEEE/LEOS International Conference on Optical MEMS, 2023 This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum (Al) electrodes,
Sinwoo Cho +8 more
semanticscholar +1 more source
Film bulk acoustic resonators (FBARs) as biosensors: A review [PDF]
Biosensors and Bioelectronics, 2018 Biosensors play important roles in different applications such as medical diagnostics, environmental monitoring, food safety, and the study of biomolecular interactions. Highly sensitive, label-free and disposable biosensors are particularly desired for many clinical applications.
Zhang, Y. +4 more
openaire +3 more sources
Design and Optimization of a BAW Microphone Sensor
Micromachines, 2022 A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology.
Huihui Guo +4 more
doaj +1 more source
Coatings, 2022 To ensure that the performance of filters matches the continuous development in communication frequency bands, the influence of temperature on filter performance must be considered during the fabrication of filters.
Ya Liu +4 more
semanticscholar +1 more source
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications
Microsystems & Nanoengineering, 2022 Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor (CMOS) compatible integration process.
Yang Zou +9 more
doaj +1 more source
Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals
物联网学报, 2022 A new structure of film bulk acoustic resonator (FBAR) based on phononic crystal (PnC) was proposed.The phononic crystal was used as the acoustic reflection layer at the bottom of the bulk acoustic wave resonator, which has the characteristics of high ...
Linhao SHI +5 more
doaj +2 more sources
Italian National Conference on Sensors, 2023 Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to
G. Niro +5 more
semanticscholar +1 more source
Micromachines, 2018 We demonstrate a promising strategy to combine the micro-electromechanical film bulk acoustic resonator and the nanostructured sensitive fibers for the detection of low-concentration formaldehyde vapor.
Da Chen +5 more
doaj +1 more source