Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator [PDF]
Micromachines, 2016 A high-overtone bulk acoustic resonator (HBAR) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (Q) and multi-mode resonance spectrum. By analyzing the influences of each layer’s material and structure (
Jian Li, Mengwei Liu, Chenghao Wang
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Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator [PDF]
Micromachines, 2023 The arrival of the 5G era has promoted the need for filters of different bandwidths. Thin-film bulk acoustic resonators have become the mainstream product for applications due to their excellent performance.
Yuanhang Qu +9 more
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Electromechanical Coupling Analysis of a Piezoelectric–Flexoelectric–Semiconductor Cantilever Beam [PDF]
MicromachinesThis paper presents a theoretical study on the electromechanical coupling response of piezoelectric–flexoelectric–semiconductor (PFS) nanocantilevers by adopting flexoelectric elasticity and semiconductor theory.
Yaxuan Su, Xuezhi Wu, Zhidong Zhou
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Mechanisms of Concentric Ring Electrodes in Tuning the Performance of Z-Cut Lithium Niobate Ultrasonic Transducers [PDF]
SensorsZ-cut lithium niobate single crystal demonstrates considerable promise for contact-based ultrasonic nondestructive testing and structural health monitoring (SHM) transducers due to its high piezoelectric coefficients, strong electromechanical coupling ...
Xuesheng Ouyang +10 more
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Design and Experimental Investigation of a Compact Traveling-Wave Piezoelectric Angular Motion Motor [PDF]
MicromachinesThis paper presents the design, numerical analysis, and experimental investigation of a compact traveling-wave piezoelectric motor for continuous and incremental angular motion. The key advancement of the proposed design is a compact coaxial direct-drive
Laurynas Šišovas, Andrius Čeponis
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Micromachined Edge Reflection Thin-Film SAW Resonator on LiNbO3-on-SiC [PDF]
MicromachinesThis work presents the design and experimental demonstration of a micromachined edge reflection thin-film surface acoustic wave (SAW) resonator on an X-cut LiNbO3-on-SiC platform.
Yu-Hao Wang +8 more
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AIP Advances, 2019 In this paper, the apparent elasticity method is used to derive the transverse effective electromechanical coupling coefficient Ke of a piezoelectric rectangular thin plate with an arbitrary aspect ratio G (defined as the ratio of the two transverse ...
Bocheng Ji +4 more
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High-Performance and Thermally Robust A1-Mode Lamb Wave Resonators on Bonded LiNbO3/SiC Membranes [PDF]
MicromachinesIn radiofrequency filters, there is an increasing demand for high-frequency, wide-bandwidth operation. Recently, laterally excited A1-mode Lamb wave resonators (XBARs) have attracted significant attention; however, freestanding structures are ...
Noriyuki Watanabe +4 more
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Applied Sciences, 2023 In this study, we propose a fast calculation method that utilizes Kirchhoff’s hypotheses and electroelasticity theory to derive the resonant frequency, antiresonant frequency, and effective electromechanical coupling coefficient of a trilaminar bending ...
Chenhui Zhu +4 more
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Influence of Etching Trench on
Micromachines, 2022 As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance.
Chao Gao +6 more
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