Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator [PDF]
Micromachines, 2023 The arrival of the 5G era has promoted the need for filters of different bandwidths. Thin-film bulk acoustic resonators have become the mainstream product for applications due to their excellent performance.
Yuanhang Qu +9 more
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Temperature Cycle Reliability Analysis of an FBAR Filter-Bonded Ceramic Package [PDF]
Micromachines, 2023 On the background that the operating frequency of electronic devices tends to the radio frequency (RF) segment, a film bulk acoustic resonator (FBAR) filter is widely used in communication and military fields because of its advantages of high upper ...
Wenchao Tian +4 more
doaj +2 more sources
Influence of Etching Trench on
Micromachines, 2022 As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance.
Chao Gao +6 more
doaj +2 more sources
High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector [PDF]
Sensors, 2022 A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance.
Yuxuan Hu +4 more
doaj +2 more sources
The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions
Sensors, 2020 In this paper, an infinite circular ZnO thin film bulk acoustic resonator (FBAR) with a frame-like electrode operating at the thickness-extensional (TE) mode is studied.
Xueli Zhao +4 more
doaj +3 more sources
Design and Fabrication of 3.5 GHz Band-Pass Film Bulk Acoustic Resonator Filter [PDF]
MicromachinesWith the development of wireless communication, increasing signal processing presents higher requirements for radio frequency (RF) systems. Piezoelectric acoustic filters, as important elements of an RF front-end, have been widely used in 5G-generation ...
Yu Zhou +10 more
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Advances in MEMS, Optical MEMS, and Nanophotonics Technologies for Volatile Organic Compound Detection and Applications. [PDF]
Small SciVolatile organic compounds (VOCs) are ubiquitous in natural and human environments, posing environmental and health risks. Recent advancements in micro‐electromechanical system and optical sensing offer new possibilities for VOC detection. This article reviews their progress, focusing on mechanisms, artificial intelligence enhancement, and applications
Li D, Zhou H, Ren Z, Lee C.
europepmc +2 more sources
Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices [PDF]
MicromachinesAcoustic energy penetrates into the Si substrate at cavity boundaries. Due to this, the air cavity-based bulk acoustic resonators experience higher harmonic mode, parasitic resonance, and spurious mode.
Raju Patel +3 more
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Design and Optimization of a BAW Microphone Sensor [PDF]
Micromachines, 2022 A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology.
Huihui Guo +4 more
doaj +2 more sources
Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band [PDF]
SensorsFilm bulk acoustic-wave resonators (FBARs) are widely utilized in the field of radio frequency (RF) filters due to their excellent performance, such as high operation frequency and high quality.
Chao Gao +10 more
doaj +2 more sources