Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices. [PDF]
Micromachines (Basel)Acoustic energy penetrates into the Si substrate at cavity boundaries. Due to this, the air cavity-based bulk acoustic resonators experience higher harmonic mode, parasitic resonance, and spurious mode.
Patel R +3 more
europepmc +2 more sources
High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector. [PDF]
Sensors (Basel), 2022 A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance.
Hu Y, Dong B, Lei L, Wang Z, Ruan S.
europepmc +2 more sources
Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator. [PDF]
Micromachines (Basel), 2023 The arrival of the 5G era has promoted the need for filters of different bandwidths. Thin-film bulk acoustic resonators have become the mainstream product for applications due to their excellent performance.
Qu Y +9 more
europepmc +2 more sources
Enhancement of Quality Factors in a 6.5 GHz Resonator Using Mo/SiC Composite Microstructures. [PDF]
Micromachines (Basel)This study addresses the critical challenge of lateral acoustic wave energy leakage in high-frequency film bulk acoustic resonators (FBARs) and elucidates the reflection mechanism of acoustic waves at acoustic reflection boundaries.
Lin B +8 more
europepmc +2 more sources
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications. [PDF]
Microsyst Nanoeng, 2022 Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor (CMOS) compatible integration process.
Zou Y +9 more
europepmc +2 more sources
Acoustofluidic Biosensors. [PDF]
Micromachines (Basel)The rapid and precise detection of biomarkers and pathogens remains a critical challenge in clinical diagnostics. Traditional methodologies are frequently hindered by protracted workflows, complex sample preparation, and reliance on resource-intensive ...
Chen CJ, Kwon JS, Chuang HS.
europepmc +2 more sources
Recent Advances in AlN-Based Acoustic Wave Resonators. [PDF]
Micromachines (Basel)AlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size.
Lu H +7 more
europepmc +2 more sources
Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz-3.2 GHz S-Band. [PDF]
Sensors (Basel)Film bulk acoustic-wave resonators (FBARs) are widely utilized in the field of radio frequency (RF) filters due to their excellent performance, such as high operation frequency and high quality.
Gao C +10 more
europepmc +2 more sources
Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator. [PDF]
Sensors (Basel), 2023 Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to
Niro G +5 more
europepmc +2 more sources
Multi-mode piezoelectric radiation-based microantennas and miniaturized wireless sensing unit driven by bulk acoustic waves. [PDF]
Nat CommunWireless sensing systems enable real-time, non-contact monitoring for next-generation intelligent platforms. Ideal wireless sensing systems feature compact, low power consumption, and long communication range.
Cai X +14 more
europepmc +2 more sources