High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector [PDF]
Sensors, 2022 A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance.
Yuxuan Hu +4 more
doaj +2 more sources
Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator [PDF]
Micromachines, 2023 The arrival of the 5G era has promoted the need for filters of different bandwidths. Thin-film bulk acoustic resonators have become the mainstream product for applications due to their excellent performance.
Yuanhang Qu +9 more
doaj +2 more sources
Fabrication of Air Cavity Structures Using DRIE for Acoustic Signal Confinement in FBAR Devices [PDF]
MicromachinesAcoustic energy penetrates into the Si substrate at cavity boundaries. Due to this, the air cavity-based bulk acoustic resonators experience higher harmonic mode, parasitic resonance, and spurious mode.
Raju Patel +3 more
doaj +2 more sources
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications [PDF]
Microsystems & Nanoengineering, 2022 Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor (CMOS) compatible integration process.
Yang Zou +9 more
doaj +2 more sources
Enhancement of Quality Factors in a 6.5 GHz Resonator Using Mo/SiC Composite Microstructures [PDF]
MicromachinesThis study addresses the critical challenge of lateral acoustic wave energy leakage in high-frequency film bulk acoustic resonators (FBARs) and elucidates the reflection mechanism of acoustic waves at acoustic reflection boundaries.
Binghui Lin +8 more
doaj +2 more sources
Recent Advances in AlN-Based Acoustic Wave Resonators [PDF]
MicromachinesAlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size.
Hao Lu +7 more
doaj +2 more sources
Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator [PDF]
Sensors, 2023 Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to
Giovanni Niro +5 more
doaj +2 more sources
Label-free detection of human prostate-specific antigen (hPSA) using film bulk acoustic resonators (FBARs) [PDF]
Sensors and Actuators B: Chemical, 2013 Label-free detection of cancer biomarkers using low cost biosensors has promising applications in clinical diagnostics. In this work, ZnO-based thin film bulk acoustic wave resonators (FBARs) with resonant frequency of ∼1.5 GHz and mass sensitivity of 0 ...
Ashley, GM +7 more
core +6 more sources
Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz–3.2 GHz S-Band [PDF]
SensorsFilm bulk acoustic-wave resonators (FBARs) are widely utilized in the field of radio frequency (RF) filters due to their excellent performance, such as high operation frequency and high quality.
Chao Gao +10 more
doaj +2 more sources
Design and Optimization of a BAW Microphone Sensor [PDF]
Micromachines, 2022 A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology.
Huihui Guo +4 more
doaj +2 more sources